FC-R7820 AERA FC-R7800 Analog Metal-Sealed MFC 35-200 slm

Product Overview

• FC-R7820 is a high-flow analog mass flow controller from the AERA FC-R7800 Series.
• It uses a metal-sealed design. This suits corrosive and inert gas lines.
• Full-scale flow reaches 35 to 200 slm. That covers many high-flow semiconductor steps.
• Accuracy stays within +/-2% of full scale. Repeatability is +/-0.2% of full scale.
• Response time is under 3 seconds to within +/-2% of full scale.
• The valve is a solenoid type. Choose normally-open or normally-closed.
• This model is the standard unheated version. A heated option is not included.

Technical Data

• Brand: AERA
• Model: FC-R7820
• Series: FC-R7800 Series (Analog, metal-sealed)
• Full-Scale Flow Range: 35 to 200 slm
• Accuracy: <= +/-2% of full scale
• Repeatability: <= +/-0.2% of full scale
• Response Time: < 3 sec to within +/-2% of full scale between set points
• Linearity: <= +/-1% of full scale
• Zero Stability: Less than 0.5% of full-scale flow over one year
• Control Range / Turndown: 2 to 100% of full scale (5 to 100% for full-scale flow above 150 slm)
• Gas Type: All inert and corrosive gases
• Operating Temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Operating Pressure: Differential pressure 21 to 40 psiD (28 to 43 psiD for full-scale flow above 150 slm); normal operating pressure 70 psig; maximum inlet pressure 140 psig
• Wetted Materials: Stainless steel type 316(L) and 316, PTFE, magnetic stainless
• Seals: Metal (316L)
• Electrical Interface: Analog 0 to 5 VDC command and output; Aera 9-pin D connector; top connector position recommended
• Power Supply: +15 VDC +/-2% at 25 mA; -15 VDC +/-2% at 200 mA; 3.5 W max
• Valve Type: Solenoid (normally-open or normally-closed)
• Leak Integrity: 1 x 10^-10 atm-cc/sec (He) max; 1 x 10^-11 Pa-m3/sec (He) max
• Dimensions: 152 x 38 x 192.3 mm (H x W x D); port-to-port 183.8 mm with 1/4 in VCR; 192.3 mm with 3/8 in VCR
• Weight: 2.27 kg (5.0 lb)
• Heated Option: No (standard unheated version)
• Compliance/Certification: RoHS

Installation Guide

• Mount the FC-R7820 in a clean gas line. Keep the body free from mechanical stress.
• Use the top connector position for the 9-pin D connector. This eases cable routing.
• Check differential pressure before start-up. Stay within 21 to 40 psiD.
• For flow above 150 slm, set differential pressure to 28 to 43 psiD.
• Keep inlet pressure at or below 140 psig. Normal operation is 70 psig.
• Use 3/8 in VCR fittings for high-flow lines. The 1/4 in VCR option is also available.
• Connect +15 VDC and -15 VDC power lines with correct polarity.
• Route the analog 0 to 5 VDC command and output cables away from noisy power lines.

Setup and Maintenance

• Zero the controller after warm-up. This supports stable low-end control.
• Run a leak check with helium. The limit is 1 x 10^-10 atm-cc/sec.
• Keep the valve free of particles. Use filtered gas at the inlet.
• Check zero stability once a year. Drift stays under 0.5% of full-scale flow.
• Clean or replace wetted parts only with 316L stainless steel compatible methods.
• Do not open the metal seal unless trained service staff are present.
• Log pressure and flow readings. This helps spot drift early.

Compatibility Notes

• The FC-R7820 handles inert and corrosive gases. This suits CVD, PVD, etch, diffusion, ion implantation, and sputtering.
• It uses analog 0 to 5 VDC control. Pair it with controllers that support this signal.
• The Aera 9-pin D connector is the standard electrical interface.
• Metal seals (316L) resist corrosive service. PTFE and magnetic stainless parts are also wetted.
• The 3/8 in VCR body option supports higher flow without extra adapters.

Certification

• RoHS compliant.
• Leak integrity meets helium limits for metal-sealed service.
• Official product pages were active as of 2026-11. Last verified: 2026-11.

Packing List

• 1 x AERA FC-R7820 mass flow controller
• 1 x Aera 9-pin D connector mating hardware (as supplied)
• 1 x user documentation set (as supplied)
• VCR fittings and cables are ordered separately. Confirm port size before order.

FAQ

• Q: Can this controller run corrosive gases?
  A: Yes. The metal-sealed body and 316L seals support corrosive and inert gases.
• Q: What flow range does the FC-R7820 cover?
  A: It covers 35 to 200 slm. For full-scale flow above 150 slm, use the 3/8 in VCR option and higher differential pressure.
• Q: How fast does it respond?
  A: It reaches within +/-2% of full scale in under 3 seconds between set points.
• Q: Is this model heated?
  A: No. This is the standard unheated version. A heated option is not part of this model.
• Q: What signal does it use?
  A: It uses analog 0 to 5 VDC for command and output. The connector is an Aera 9-pin D type.
• Q: What pressure should I set?
  A: Keep differential pressure at 21 to 40 psiD. For flow above 150 slm, use 28 to 43 psiD. Maximum inlet pressure is 140 psig.
• Q: What is the typical field experience with zero drift?
  A: Users often see zero stability within 0.5% of full-scale flow over one year. Annual zero checks help keep readings tight.
• Q: Which fittings come with the unit?
  A: Port-to-port length is 183.8 mm with 1/4 in VCR. It is 192.3 mm with 3/8 in VCR. Order fittings to match your line.