FC-770A AERA Analog Mass Flow Controller | FC-7700 Series

FC-770A Analog Mass Flow Controller by AERA

The FC-770A is a 3-digit analog mass flow controller. It belongs to the FC-7700 Series with elastomer seals. This unit handles 10 sccm to 5 slm full-scale flow. It delivers reliable control for non-corrosive gases in semiconductor processes.

Description

The FC-770A combines a proven analog design with an industry-standard footprint. It uses a normally-open solenoid valve and elastomer sealing. The device supports all inert gases. Typical uses include CVD, PVD, etch, diffusion, ion implantation, and sputtering. The compact body fits tight tool spaces.

Technical Data

• Brand: AERA
• Model: FC-770A
• Series: FC-7700 Series (3-digit analog, elastomer-sealed)
• Full-scale flow range: 10 sccm to 5 slm
• Accuracy: ≤ ±1% of full scale
• Repeatability: ≤ ±0.2% of full scale
• Linearity: ≤ ±0.5% of full scale
• Response time: < 2 sec flow-settling between set points
• Control range / turndown: 2 to 100% of full scale
• Zero stability: Less than 0.5% of full-scale flow over one year
• Gas type: All inert gases (e.g. N2, O2, Ar, He)
• Operating pressure: Differential 7 to 40 psiD; normal 70 psig; max inlet 140 psig
• Wetted materials: Stainless steel type 316(L), PTFE, magnetic stainless
• Seals: Elastomer (Fluoroelastomer or Chloroprene Rubber)
• Valve type: Solenoid (normally-open)
• Leak integrity: 1 x 10⁻⁶ atm-cc/sec (He) max
• Electrical interface: Analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
• Power supply: +15 VDC ±2% at 25 mA; −15 VDC ±2% at 180 mA; 3.1 W max
• Operating temperature: 5 to 45 °C (41 to 113 °F)
• Heated option: No (standard unheated version)
• Dimensions (H×W×D): 122 x 32 x 124 mm
• Weight: 1.0 kg (2.2 lb)
• Compliance: RoHS

Installation Guide

• Mount the FC-770A in a clean, dry location. Keep the 20-pin connector accessible.
• Use the industry-standard footprint for drop-in replacement. This saves tool downtime.
• Connect inlet and outlet lines with compatible fittings. Check for leaks before pressurizing.
• Apply differential pressure between 7 and 40 psiD for stable control. Never exceed 140 psig at the inlet.
• Wire the 20-pin card-edge connector to the analog 0 to 5 VDC command and output signals.
• Provide +15 VDC and −15 VDC power. Confirm current draw stays within the 3.1 W limit.
• Purge the gas line with dry inert gas before first use. This protects the sensor and valve.

Setup and Maintenance Ease

• The analog interface simplifies setup. No digital configuration software is needed.
• The normally-open valve fails safe. This supports safe gas shutoff during power loss.
• Zero stability stays within 0.5% of full scale over one year. This reduces recalibration frequency.
• Elastomer seals are field-serviceable. Replace them when flow drift appears.
• Keep the unit within 5 to 45 °C. This preserves accuracy and seal life.
• Use a clean gas supply. This protects wetted parts and extends service intervals.

Compatibility Notes

• The FC-770A works with all inert gases such as N2, O2, Ar, and He.
• Do not use corrosive gases. The elastomer seals and 316L body suit non-corrosive duty only.
• The 20-pin Aera card-edge connector matches standard Aera analog MFC wiring.
• The 0 to 5 VDC analog command and output fit common semiconductor tool controllers.
• The industry-standard footprint allows direct replacement of similar analog MFCs.
• This unheated version suits ambient gas lines. Heated lines need a different model.

Certification Information

• RoHS compliant. This meets restrictions on hazardous substances.
• Leak integrity is rated at 1 x 10⁻⁶ atm-cc/sec (He) max. This supports safe gas containment.
• Build materials include 316(L) stainless steel, PTFE, and magnetic stainless. These resist corrosion in inert gas service.

Packing List

• 1 x FC-770A analog mass flow controller
• 1 x protective connector cover
• 1 x calibration certificate
• 1 x quick-start guide
• 1 x RoHS declaration

FAQ

What flow range does this model cover?

It covers 10 sccm to 5 slm full scale. You can choose a specific range within these limits at order.

Can I use oxygen with this controller?

Yes. Oxygen is an inert gas for this unit. The elastomer seals handle it well in non-corrosive service.

How long does the flow signal take to settle?

It settles in under 2 seconds between set points. This fast response supports stable process steps.

What power does the unit need?

It needs +15 VDC and −15 VDC. Total draw stays at or below 3.1 W.

Does this version include heating?

No. This is the standard unheated version. Heated gas lines require a different model in the series.

How often should I recalibrate?

Zero drift stays under 0.5% of full scale for one year. Most users recalibrate annually or when drift appears.

What happens if power fails?

The solenoid valve is normally-open. It closes on power loss to support safe gas shutoff.

Can I replace an older MFC with this one?

Yes, if the older unit uses the same footprint and 20-pin connector. Check pressure ratings and gas compatibility first.

Why does my flow reading drift over time?

Seal wear or dirty gas can cause drift. Replace elastomer seals and purge the line with dry inert gas.

What should I check if the valve does not respond?

Check the ±15 VDC supply and the 0 to 5 VDC command signal. Also confirm the 20-pin connector is fully seated.