Product details
Product Overview
- FC-R7810 is a metal-sealed analog mass flow controller from the AERA FC-R7800 Series.
- It handles mid-flow ranges from 6 to 50 slm with high accuracy.
- This model suits corrosive and inert gas applications in semiconductor processing.
- Response time stays under 1 second for fast flow settling.
- The design combines 316L stainless steel seals with robust leak integrity.
- Use it for CVD, PVD, etch, diffusion, ion implantation, and sputtering.
Technical Specifications
- Brand: AERA
- Model: FC-R7810
- Series: FC-R7800 Series (Analog, metal-sealed)
- Full-scale flow range: 6 to 50 slm
- Normally-open: 6 to 20 slm
- Normally-closed: 6 to 50 slm
- Accuracy: within ±1% of full scale
- Repeatability: within ±0.2% of full scale
- Response time: under 1 sec flow-settling time to within ±2% of full scale
- Linearity: within ±0.5% of full scale (±1% above 30 slm)
- Zero stability: under 0.5% of full-scale flow over one year
- Control range / turndown: 2 to 100% of full scale
- Gas type: all inert and corrosive gases
- Operating pressure:
- Differential pressure 10 to 40 psiD
- 14 to 40 psiD for normally-closed high-flow versions
- Normal operating pressure 70 psig
- Maximum inlet pressure 140 psig
- Wetted materials: 316L and 316 stainless steel, PTFE, magnetic stainless
- Seals: metal (316L)
- Electrical interface: analog 0 to 5 VDC command and output; Aera 9-pin D connector
- Heated option: no (standard unheated version)
- Operating temperature: 5 to 45°C (41 to 113°F)
- Power supply:
- +15 VDC ±2% at 25 mA
- -15 VDC ±2% at 180 mA
- 3.1 W maximum
- Valve type: solenoid (normally-open or normally-closed)
- Leak integrity:
- 1 x 10^-10 atm-cc/sec (He) max
- 1 x 10^-11 Pa-m3/sec (He) max
- Dimensions (H×W×D): 132 x 28.6 x 183.8 mm
- Weight: 1.5 kg (3.3 lb)
Installation Guide
- Mount the FC-R7810 with the outline drawing for correct fit.
- Keep differential pressure within 10 to 40 psiD for stable control.
- Use the Aera 9-pin D connector for analog command and output.
- Provide clean, dry gas to protect the metal-sealed valve.
- Verify inlet pressure stays below 140 psig during operation.
Setup and Maintenance Convenience
- The analog interface simplifies wiring and controller integration.
- Metal seals reduce wear and support long service intervals.
- Zero stability under 0.5% per year cuts recalibration needs.
- Fast response time supports quick set-point changes.
- Standard unheated design keeps service access simple.
Compatibility Notes
- Works with all inert and corrosive gases.
- Best suited for mid-flow semiconductor processes.
- Fits CVD, PVD, etch, diffusion, ion implantation, and sputtering lines.
- Use normally-open versions for 6 to 20 slm ranges.
- Use normally-closed versions for 6 to 50 slm ranges.
Certification and Compliance
- RoHS compliant.
- High leak integrity helps meet demanding process safety needs.
Package Contents
- One AERA FC-R7810 mass flow controller.
- Product documentation set.
- Standard electrical connector interface as specified.
FAQ
- Q: What flow range does this controller cover?
- A: It covers 6 to 50 slm full scale, with narrower ranges for normally-open units.
- Q: Can I use it with corrosive gases?
- A: Yes. The 316L stainless steel and PTFE wetted parts support corrosive gas service.
- Q: How fast does it reach a new set point?
- A: Flow settles within ±2% of full scale in under 1 second.
- Q: Does it need a heated enclosure?
- A: No. This standard version is unheated and runs from 5 to 45°C.
- Q: What pressure should I apply?
- A: Keep differential pressure at 10 to 40 psiD and inlet pressure below 140 psig.
- Q: What is the benefit of metal seals?
- A: They resist corrosive attack and help maintain very low leak rates.
- Q: How often should I recalibrate?
- A: Zero stability stays under 0.5% per year, so annual checks are usually enough.
- Q: Can I replace a competing analog controller with this unit?
- A: Often yes, because it uses a 0 to 5 VDC interface and a standard 9-pin D connector.
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