FC-R7720 AERA Analog MFC | 35-200 slm High-Flow FC-R7700 Series

FC-R7720 AERA FC-R7700 Series Analog Elastomer-Sealed MFC

FC-R7720 is a high-flow analog mass flow controller from AERA. It belongs to the FC-R7700 Series with elastomer sealing. The unit handles 35 to 200 slm full-scale flow. It fits semiconductor processes and other non-corrosive gas applications.

This model gives ±2% of full scale accuracy and fast response. It uses a 316L stainless steel body with PTFE and magnetic stainless wetted parts. The analog 0 to 5 VDC interface connects through an Aera 9-pin D connector. The compact body measures 151 x 37.5 x 183.8 mm and weighs 2.27 kg. It supports normally-open or normally-closed solenoid valves. RoHS compliance is standard.

Technical Data

• Brand: AERA
  • Model: FC-R7720
  • Series: FC-R7700 Series (Analog, elastomer-sealed)
• Flow measurement range: 35 to 200 slm
  • Control range / turndown: 2 to 100% of full scale
    • 5 to 100% for full-scale flow above 150 slm
• Accuracy: ≤ ±2% of full scale
• Repeatability: ≤ ±0.2% of full scale
• Linearity: ≤ ±1% of full scale
• Frequency response / response time: < 3 sec to within ±2% of full scale between set points
• Resolution: Analog command and output, 0 to 5 VDC
• Zero stability: Less than 0.5% of full-scale flow over one year
• Gas type: All inert gases (e.g. N2, O2, Ar); non-corrosive gas applications
• Operating pressure: Differential pressure 21 to 40 psiD
  • 28 to 43 psiD for full-scale flow above 150 slm
  • Normal operating pressure 70 psig
  • Maximum inlet pressure 140 psig
• Temperature range: 5 to 45 °C (41 to 113 °F)
• Environmental resistance: Elastomer seals (fluoroelastomer or chloroprene rubber); unheated standard version
• Interference immunity: Stable analog 0 to 5 VDC interface; Aera 9-pin D connector; top connector position recommended
• Wetted materials: Stainless steel type 316(L), PTFE, magnetic stainless
• Valve type: Solenoid (normally-open or normally-closed)
• Leak integrity: 1 x 10^-6 atm-cc/sec (He) max
  • 1 x 10^-7 Pa-m3/sec (He) max
• Power supply: +15 VDC ±2% at 25 mA
  • -15 VDC ±2% at 200 mA
  • 3.5 W max
• Dimensions: 151 x 37.5 x 183.8 mm (H×W×D)
  • Port-to-port 183.8 mm
  • 3/8 in VCR: 192.3 mm
• Weight: 2.27 kg (5.0 lb)

Installation Guide

• Mount the FC-R7720 in a clean, dry location.
  • Keep the top connector position for easy access.
  • Allow space for the 3/8 in VCR option if used.
• Connect gas lines with non-corrosive, inert gas supply only.
  • Respect differential pressure 21 to 40 psiD.
  • Use 28 to 43 psiD for full-scale flow above 150 slm.
  • Keep inlet pressure at or below 140 psig.
• Wire the Aera 9-pin D connector for analog 0 to 5 VDC command and output.
  • Provide +15 VDC and -15 VDC supply.
  • Check polarity before power-up.
• Use the normally-open or normally-closed solenoid valve as required by the process.
  • Confirm leak integrity after installation.
• Keep operating temperature between 5 and 45 °C.

Setup and Maintenance Convenience

• Analog 0 to 5 VDC interface simplifies setup with common controllers.
• Top connector position saves time during wiring and checks.
• Elastomer seals allow routine service without special tools.
  • Fluoroelastomer or chloroprene rubber options suit different gas lines.
• Zero stability under 0.5% of full scale per year reduces re-calibration.
  • Long service intervals support high uptime.
• Unheated standard version keeps the unit simple and easy to handle.

Compatibility Notes

• Works with all inert gases such as N2, O2 and Ar.
  • Use only non-corrosive gas applications.
• Analog 0 to 5 VDC command and output fit many legacy and current controllers.
• The Aera 9-pin D connector matches standard Aera cabling.
• 3/8 in VCR option supports common semiconductor gas lines.
• RoHS compliant for modern equipment builds.

Certification Information

• Compliance / Certification: RoHS
• Leak integrity: 1 x 10^-6 atm-cc/sec (He) max
  • 1 x 10^-7 Pa-m3/sec (He) max

Packing List

• 1 x FC-R7720 AERA FC-R7700 Series mass flow controller
• 1 x Aera 9-pin D connector mating set (as supplied)
• 1 x Quick reference for analog 0 to 5 VDC wiring
• 1 x RoHS compliance note
• 1 x Calibration report (factory full-scale flow check)

FAQ

• What flow range does the FC-R7720 cover?
  • It covers 35 to 200 slm full scale.
• Can I use this MFC with oxygen or argon?
  • Yes. It works with all inert gases, including O2, N2 and Ar.
  • Only use non-corrosive gas applications.
• How fast does the unit respond between set points?
  • It reaches within ±2% of full scale in under 3 seconds.
• What pressure range should I plan for?
  • Use differential pressure 21 to 40 psiD for most flows.
  • For full-scale flow above 150 slm, use 28 to 43 psiD.
  • Keep normal operating pressure at 70 psig.
  • Maximum inlet pressure is 140 psig.
• Does the FC-R7720 have a heated option?
  • No. The standard version is unheated.
• What is the turndown ratio?
  • 2 to 100% of full scale.
  • 5 to 100% for full-scale flow above 150 slm.
• Which valve options are available?
  • Normally-open or normally-closed solenoid valve.
• How often does zero drift become an issue?
  • Zero stability is under 0.5% of full-scale flow over one year.
• What connector and signal does it use?
  • Aera 9-pin D connector.
  • Analog 0 to 5 VDC command and output.
• From experience, what should I check first if flow reading looks off?
  • Check the differential pressure against the flow setting.
  • Confirm the gas type matches the calibration gas.
  • Inspect the 9-pin D connector for tight seating.
  • Verify +15 VDC and -15 VDC supply levels.
• In real installations, how do I avoid sealing problems?
  • Keep gas lines clean and dry before connection.
  • Avoid over-tightening the VCR fittings.
  • Use the specified elastomer seal for your gas.

Typical applications: semiconductor processing, including CVD, PVD, etch, diffusion, ion implantation and sputtering with high-flow, non-corrosive gases.