FC-R7800 AERA Metal-Sealed Analog MFC 10 sccm to 5 slm

Product Overview

FC-R7800 is a metal-sealed analog mass flow controller from AERA. It handles inert and corrosive gases with high accuracy. The all-metal design protects gas purity. It suits demanding semiconductor processes.

• Full-scale range: 10 sccm to 5 slm. One platform covers low and mid flows.
• Accuracy: within +/-1% of full scale. Stable results across the control range.
• Response: under 1 second settling time to +/-2% of full scale.
• Wetted parts: 316L and 316 stainless steel, PTFE, magnetic stainless. Metal seals keep leaks minimal.
• Leak integrity: 1 x 10^-10 atm-cc/sec (He). This protects yield and safety.

Core Technical Data

• Brand: AERA
• Model: FC-R7800
• Series: FC-R7800 Series (Analog, metal-sealed)
• Module type: Analog mass flow controller (MFC)
• Flow range: 10 sccm to 5 slm full scale
• Accuracy: +/-1% of full scale or better
• Repeatability: +/-0.2% of full scale or better
• Linearity: +/-0.5% of full scale or better
• Response time: under 1 second flow-settling to +/-2% of full scale
• Control range: 2% to 100% of full scale (turndown 50:1)
• Zero stability: under 0.5% of full scale per year
• Gas types: all inert and corrosive gases
• Operating pressure: differential 7 to 40 psiD; normal 70 psig; max inlet 140 psig
• Wetted materials: 316L and 316 stainless steel, PTFE, magnetic stainless
• Seals: metal (316L)
• Valve: solenoid, normally-open or normally-closed
• Electrical interface: analog 0 to 5 VDC command and output; Aera 9-pin D connector
• Power: +15 VDC at 25 mA; -15 VDC at 180 mA; 3.1 W max
• Heated option: no (standard unheated version)
• Dimensions: 132 x 28.6 x 183.8 mm (port-to-port 183.8 mm with 1/4 in VCR)
• Weight: 1.0 kg (2.2 lb)

Temperature Range and Environment

• Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Pressure tolerance: max inlet 140 psig; normal 70 psig
• Leak integrity: 1 x 10^-10 atm-cc/sec (He) max; 1 x 10^-11 Pa-m3/sec (He) max
• Compliance: RoHS

Installation Guide

• Mount the unit in any orientation. Keep the port-to-port length of 183.8 mm in mind for 1/4 in VCR fittings.
• Use clean, dry gas lines. Purge lines before first use.
• Keep differential pressure between 7 and 40 psiD for stable control.
• Do not exceed 140 psig inlet pressure.
• Connect the 9-pin D connector to the Aera analog interface.
• Provide +15 VDC and -15 VDC within +/-2%. Check current draw before power-up.
• Keep ambient temperature within 5 to 45 degrees C.
• Match the valve type to your fail-safe needs: normally-open or normally-closed.

Setup and Maintenance Ease

• Standard connectors and dimensions make drop-in replacement simple.
• Analog 0 to 5 VDC command and output need no digital setup.
• Zero stability under 0.5% per year cuts recalibration frequency.
• Metal seals resist corrosion and reduce downtime.
• No heater means fewer parts and simpler service.

Compatibility Notes

• Works with inert and corrosive gas lines.
• Fits systems that use the Aera 9-pin D analog interface.
• Replaces units with the same 1/4 in VCR port-to-port length of 183.8 mm.
• Suits semiconductor tools: CVD, PVD, etch, diffusion, ion implantation and sputtering.

Certification and Compliance

• RoHS compliant
• High leak integrity verified to 1 x 10^-10 atm-cc/sec (He)
• Built with 316L and 316 stainless steel wetted parts

Packing List

• 1 x AERA FC-R7800 analog mass flow controller
• 1 x 9-pin D connector
• 1 x calibration certificate
• 1 x user manual

FAQ

Q: Can I use one FC-R7800 for both low and high flows?
A: Yes. The full-scale range covers 10 sccm to 5 slm. Pick the unit closest to your working flow.

Q: How fast does the flow settle after a set point change?
A: It settles within +/-2% of full scale in under one second.

Q: Does it handle corrosive gases?
A: Yes. Metal seals and 316L stainless steel wetted parts resist corrosive media.

Q: What pressure do I need at the inlet?
A: Keep differential pressure at 7 to 40 psiD. Do not exceed 140 psig inlet.

Q: Is a heated version available?
A: This standard unit is unheated. Check AERA options if you need heating.

Q: From experience, what causes drift?
A: Dirty gas lines and unstable supply pressure are common causes. Purge lines and regulate pressure first.

Q: My old MFC failed. Can I swap it directly?
A: Often yes. Match the 1/4 in VCR port-to-port length of 183.8 mm and the 9-pin D interface.

Q: How often should I recalibrate?
A: Zero stability is under 0.5% per year. Many users check calibration once a year.

Current lifecycle status: active. Official product pages verified as of 2026-11.