FC-R7700 AERA Analog Elastomer-Sealed Mass Flow Controller

Product Overview

• FC-R7700 is an analog mass flow controller from AERA.
• It belongs to the FC-R7700 Series with elastomer seals.
• The unit covers 10 sccm to 5 slm full scale.
• Accuracy stays within +/-1% of full scale.
• Repeatability is better than +/-0.2% of full scale.
• Response time is under 2 seconds to +/-2% of full scale.
• This model suits non-corrosive inert gases such as N2, O2 and Ar.
• The design is field-proven and cost-effective for industrial users.
• It replaces many other analog MFC brands with little effort.
• Typical uses include CVD, PVD, etch, diffusion and ion implantation.
• It also fits flat-panel display, data storage and coating lines.

Technical Data

• Brand: AERA
• Model: FC-R7700
• Series: FC-R7700 Series (analog, elastomer-sealed)
• Module type: Analog mass flow controller
• Full-scale flow range: 10 sccm to 5 slm
• Accuracy: +/-1% of full scale or better
• Repeatability: +/-0.2% of full scale or better
• Linearity: +/-0.5% of full scale or better
• Response time: below 2 seconds settling time
• Control range: 2% to 100% of full scale
• Zero stability: under 0.5% of full scale per year
• Gas type: all inert, non-corrosive gases
• Operating pressure: differential 7 to 40 psiD
• Normal operating pressure: 70 psig
• Maximum inlet pressure: 140 psig
• Wetted materials: 316(L) stainless steel, PTFE, magnetic stainless
• Seals: fluoroelastomer or chloroprene rubber
• Valve type: solenoid, normally-open or normally-closed
• Leak integrity: 1 x 10^-6 atm-cc/sec He max
• Electrical interface: analog 0 to 5 VDC command and output
• Connector: Aera 9-pin D connector
• Power supply: +15 VDC at 25 mA and -15 VDC at 180 mA
• Power draw: 3.1 W max
• Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Heated option: none, standard unheated version
• Dimensions: 119 x 32 x 124 mm (H x W x D)
• Weight: 1.0 kg (2.2 lb)

Measurement and Signal Performance

• Flow range: 10 sccm to 5 slm full scale
• Frequency response: flow settles in under 2 seconds
• Sensitivity: low full-scale error supports fine control
• Linearity: within +/-0.5% of full scale
• Resolution: stable control from 2% to 100% of range
• Temperature range: 5 to 45 degrees C
• Environmental tolerance: works in clean, non-corrosive gas lines
• Noise immunity: analog 0 to 5 VDC link with D connector

Installation Guide

• Mount the body on a stable, level surface.
• Keep the 32 mm body width clear for airflow.
• Use VCR, VCO or Swagelok-compatible fittings.
• Check differential pressure stays between 7 and 40 psiD.
• Keep inlet pressure below 140 psig at all times.
• Connect the 9-pin D plug to the analog controller.
• Feed clean +15 VDC and -15 VDC power.
• Purge the line with dry inert gas before use.

Setup and Maintenance

• Zero the unit after warm-up for best stability.
• Check zero drift once a year.
• Replace elastomer seals based on gas exposure.
• Keep the wetted path free of corrosive gas.
• The analog interface makes bench checks simple.
• Quick swap design cuts downtime on replacement.

Compatibility Notes

• Fits VCR, VCO and Swagelok-style connections.
• Drops into many existing analog MFC slots.
• Works with standard 0 to 5 VDC control loops.
• Replaces other brands with minor setup changes.
• Use only with inert, non-corrosive gases.

Certification and Compliance

• RoHS compliant for restricted substances.
• Leak integrity meets 1 x 10^-6 atm-cc/sec He max.
• Leak rate also meets 1 x 10^-7 Pa-m3/sec He max.

Packing List

• One AERA FC-R7700 mass flow controller
• One 9-pin D connector kit
• One calibration certificate
• One quick start guide

FAQ

• Q: Which gases can I run through this unit?
  A: Use inert, non-corrosive gases only. Examples are N2, O2 and Ar.
• Q: How fast does the flow settle?
  A: It settles within 2 seconds to +/-2% of full scale.
• Q: Can I use it in a CVD tool?
  A: Yes. CVD, PVD, etch and diffusion are common uses.
• Q: Does it need a heated body?
  A: No. This is the standard unheated version.
• Q: What power does it need?
  A: It needs +15 VDC and -15 VDC, with 3.1 W max draw.
• Q: How often should I check zero?
  A: Check once a year. Drift stays under 0.5% of full scale.
• Q: Will it fit my current gas line?
  A: It accepts VCR, VCO and Swagelok-compatible fittings.
• Q: From experience, what causes poor accuracy?
  A: Dirty gas and wrong differential pressure are common causes. Clean the line and recheck 7 to 40 psiD.
• Q: What is a practical tip for seal life?
  A: Keep corrosive gas out of the line. Swap elastomer seals on a fixed schedule.
• Q: Can I replace another brand without a full rebuild?
  A: Often yes. The 0 to 5 VDC link and standard fittings ease the swap.