FC-770AC AERA FC-7700 Series Analog MFC for Inert Gas Flow Control

FC-770AC Analog Mass Flow Controller by AERA

The FC-770AC belongs to the FC-7700 Series. It is a 3-digit analog mass flow controller. The unit uses elastomer seals. It handles inert gases in semiconductor tools. This model gives steady flow control in a compact body. The standard version is unheated. It fits most gas panels with little change.

Core Technical Data

• Brand: AERA
• Model: FC-770AC
• Series: FC-7700 Series (3-digit analog, elastomer-sealed)

Technical Specifications

• Flow range
  • Full-scale flow from 10 sccm to 5 slm
  • Control range: 2% to 100% of full scale
  • Turndown ratio: 50:1 at the low end
• Accuracy and repeatability
  • Accuracy: ≤ ±1% of full scale
  • Repeatability: ≤ ±0.2% of full scale
  • Linearity: ≤ ±0.5% of full scale
  • Zero stability: under 0.5% of full scale per year
• Response and control
  • Flow settling time: under 2 seconds between set points
  • Valve type: solenoid, normally closed (‘C’ suffix)
  • Leak integrity: 1 × 10⁻⁶ atm-cc/sec max (He)
• Gases and pressure
  • Gas type: all inert gases, such as N₂, O₂, Ar, He
  • Differential pressure: 7 to 40 psiD
  • Normal operating pressure: 70 psig
  • Maximum inlet pressure: 140 psig
• Temperature range
  • Operating: 5 to 45 °C (41 to 113 °F)
• Wetted materials and seals
  • Body: 316(L) stainless steel
  • Other wetted parts: PTFE and magnetic stainless steel
  • Seals: elastomer, fluoroelastomer or chloroprene rubber
• Electrical interface
  • Analog 0 to 5 VDC command and output
  • Aera 20-pin card-edge connector
• Power supply
  • +15 VDC ±2% at 25 mA
  • −15 VDC ±2% at 180 mA
  • Power draw: 3.1 W max
• Physical size
  • Dimensions (H × W × D): 122 × 32 × 124 mm
  • Weight: 1.0 kg (2.2 lb)
• Heated option
  • No (standard unheated version)

Installation Guide

• Mount the unit in any position that leaves the connector accessible. The footprint follows the industry standard.
• Keep the differential pressure between 7 and 40 psiD. Do not exceed 140 psig at the inlet.
• Use clean, dry inert gas only. The seals are elastomer. They suit non-corrosive gases.
• Connect the 20-pin card-edge connector with the power off. Check the +15 V and −15 V rails before you power up.
• Allow the body to reach room temperature before you set the zero point.

Setup and Maintenance Ease

• The 3-digit analog interface makes field setup simple. No digital software is needed.
• Zero trim stays stable for about one year. This cuts routine adjustment work.
• The elastomer seal design allows fast service in the field. Swap seals without special tools.
• The normally closed valve fails safe. Flow stops when power drops.
• Keep spare seals on hand. Change them when leak integrity drops below 1 × 10⁻⁶ atm-cc/sec.

Compatibility Notes

• Works with common semiconductor gas panels. Typical uses include CVD, PVD, etch, diffusion, ion implantation, and sputtering.
• Use with non-corrosive inert gases only. Do not use with corrosive or reactive gases.
• The analog 0 to 5 VDC signal fits many legacy controllers and tool interfaces.
• The 20-pin card-edge connector matches the Aera standard pinout. Check cable pinout before you connect.
• The industry-standard footprint helps drop-in replacement in tight spaces.

Certification and Compliance

• RoHS compliant
• Leak integrity tested to 1 × 10⁻⁶ atm-cc/sec max with helium

Packing List

• 1 × FC-770AC analog mass flow controller
• 1 × quick start sheet
• 1 × calibration report
• 1 × RoHS declaration

FAQ

• What gases can I use with the FC-770AC?
  • Use inert gases only. Common choices are nitrogen, oxygen, argon, and helium. The elastomer seals do not suit corrosive gases.
• How fast does the unit reach a new flow set point?
  • It settles in under 2 seconds between set points. This speed suits most process steps that need quick flow changes.
• Do I need to heat this model?
  • No. This is the standard unheated version. It works well in normal clean gas lines at 5 to 45 °C.
• What should I check if the zero reading drifts?
  • First check for pressure changes at the inlet. Then check that the body has reached room temperature. If drift stays above 0.5% per year, do a zero trim.
• Can I replace an older Aera controller with this model?
  • Often yes. The FC-770AC uses the Aera 20-pin card-edge connector and the industry-standard footprint. Compare the pinout and the pressure ratings first.
• What is the usual cause of a slow response?
  • A clogged inlet filter or low differential pressure can slow the response. Check that the differential pressure stays between 7 and 40 psiD. Then inspect the gas line for debris.
• How often should I replace the elastomer seals?
  • Inspect seals at each major tool service. Replace them when a helium leak test reads above 1 × 10⁻⁶ atm-cc/sec. In clean inert service, seals often last several years.