FC-R7710 Mass Flow Controller by AERA, FC-R7700 Series MFC

Product Overview

• FC-R7710 is a mid-flow analog mass flow controller from the AERA FC-R7700 Series.
• It uses an elastomer-sealed design. The body is unheated as standard.
• Full-scale flow covers 6 to 50 slm. Choose normally-open (6 to 20 slm) or normally-closed (6 to 50 slm).
• Accuracy is ±2% of full scale. Repeatability is ±0.2% of full scale.
• Response time stays under 3 seconds to within ±2% of full scale.
• It suits all inert gases, such as N2, O2 and Ar. Use it in non-corrosive gas lines only.
• Typical users work in semiconductor fabs: CVD, PVD, etch, diffusion, ion implantation and sputtering.
• The FC-R7710 shares the same chassis as the rest of the FC-R7700 family. This keeps spares and fit-up simple.

Technical Specifications

• Brand: AERA
• Model: FC-R7710
• Series: FC-R7700 Series (Analog, elastomer-sealed)
• Module Type: Analog mass flow controller (MFC), mid-flow
• Flow Measurement Range: 6 to 50 slm full scale
• Valve Configuration: Normally-open 6 to 20 slm; normally-closed 6 to 50 slm
• Accuracy: ±2% of full scale or better
• Repeatability: ±0.2% of full scale or better
• Frequency Response / Response Time: Under 3 seconds to within ±2% of full scale between set points
• Linearity: ±0.5% of full scale or better; ±1% of full scale or better above 30 slm full scale
• Resolution / Control Range: 2% to 100% of full scale (turndown 50:1)
• Zero Stability: Under 0.5% of full scale drift over one year
• Temperature Range: 5 to 45 °C (41 to 113 °F)
• Environmental Resistance: Indoor, non-corrosive gas service; RoHS compliant build
• Interference Immunity: Analog 0 to 5 VDC signaling on a shielded Aera 9-pin D connector
• Gas Type: All inert gases (N2, O2, Ar); non-corrosive applications
• Operating Pressure: Differential 10 to 40 psiD; 14 to 40 psiD for normally-closed high flow. Normal operating pressure 70 psig. Maximum inlet 140 psig.
• Wetted Materials: 316(L) stainless steel, PTFE, magnetic stainless
• Seals: Elastomer, fluoroelastomer or chloroprene rubber
• Leak Integrity: 1 x 10^-6 atm-cc/sec (He) max; 1 x 10^-7 Pa-m3/sec (He) max
• Electrical Interface: Analog 0 to 5 VDC command and output; Aera 9-pin D connector
• Power Supply: +15 VDC ±2% at 25 mA; -15 VDC ±2% at 180 mA; 3.1 W max
• Valve Type: Solenoid, normally-open or normally-closed
• Heated Option: No; standard unheated version
• Dimensions (H x W x D): 119 x 32 x 124 mm, mid-size body, per outline drawing
• Certification: RoHS

Installation Guide

• Mount the FC-R7710 in any safe orientation. Keep the body clear for service access.
• Flush the gas line before you fit the unit. Keep particles and moisture out.
• Set the differential pressure inside 10 to 40 psiD. Stay below 140 psig at the inlet.
• Use the Aera 9-pin D connector for command and output. Keep the cable run short and shielded.
• Feed clean +15 VDC and -15 VDC rails. Check polarity before you power up.
• Use only inert, non-corrosive gases that match the wetted materials.
• Confirm the valve type (NO or NC) against your fail-safe plan.
• Run a zero check at no flow, then verify the span at a known set point.

Setup and Maintenance

• Zero the analog output at no flow. The drift spec is under 0.5% of full scale per year.
• Check linearity with two or three set points. Expect ±0.5% of full scale on units up to 30 slm.
• Keep gas dry and filtered. This protects the elastomer seals and the sensor.
• Inspect seals at planned intervals. Swap worn fluoroelastomer or chloroprene parts.
• Log any offset or slow response. A rising offset points to a seal or sensor issue.
• The shared FC-R7700 chassis makes swap-out fast. Keep one spare on the shelf.
• No heater means no warm-up cycle. This saves time at start-up.

Compatibility Notes

• Works with controllers that supply 0 to 5 VDC analog command and readback.
• Fits gas panels built for the FC-R7700 Series footprint and connector.
• Suits inert gas lines in CVD, PVD, etch, diffusion, implant and sputter tools.
• Not for corrosive gases, heated service, or high-purity metal-seal duties.
• Pairs with standard Aera 9-pin D cables and +15/-15 VDC supplies.

Certifications

• RoHS compliant. This meets the EU directive on restricted substances.
• Built with 316(L) stainless steel, PTFE and magnetic stainless wetted parts.
• Leak integrity meets 1 x 10^-6 atm-cc/sec (He) max.
• Confirm local site rules for gas panel approvals before you install.

Packing List

• One AERA FC-R7710 analog mass flow controller
• One outline drawing and calibration sheet
• One RoHS declaration
• One quick-start note for wiring and zero check
• Cables and fittings sold separately. Confirm the 9-pin D cable length at order.

FAQ

• Which flow range should I pick?
• Pick normally-open for 6 to 20 slm. Pick normally-closed for 6 to 50 slm. Match the valve to your fail-safe plan.
• Can I use this unit with oxygen or argon?
• Yes. It handles all inert gases, including O2, N2 and Ar. Keep the gas non-corrosive.
• How often does the zero point move?
• Drift stays under 0.5% of full scale per year. A yearly zero check is enough for most lines.
• What pressure do I need at the inlet?
• Keep differential pressure between 10 and 40 psiD. For normally-closed high flow, use 14 to 40 psiD.
• Does it need a heater?
• No. This is the standard unheated build. That means no warm-up wait at start-up.
• Will it drop into an existing FC-R7700 gas panel?
• Yes. It uses the same chassis and the same 9-pin D connector. Field experience shows swap-out takes minutes.
• What causes a slow response in the field?
• Clogged filters and wet gas are the usual causes. Clean the line and check the seals first.
• Can I read flow and send a set point on one cable?
• Yes. One Aera 9-pin D cable carries the 0 to 5 VDC command and the output.
• What is the first check after install?
• Zero the unit at no flow. Then confirm span at one known set point.