FC-DR986 AERA Digital MFC 6-50 slm Compact Metal-Sealed Controller

Product Description

The FC-DR986 is a compact digital mass flow controller (MFC) from AERA. It belongs to the FC-DR980 Series. This unit uses piezoelectric valve technology and all-metal seals. It suits semiconductor processes that need reliable gas control. The device handles full-scale flow from 6 to 50 slm. Multi-gas models 7-8 support 5,001 to 30,000 sccm (N2 equivalent). It delivers fast response and stable control. The FC-DR986 offers top or side connector options. It works well in CVD, PVD, etch, diffusion, ion implantation, and sputtering gas panels.

Technical Specifications

• Brand: AERA
• Model: FC-DR986
• Series: FC-DR980 Series (Digital, Piezoelectric, Metal-Sealed, Compact)
• Full-Scale Flow Range: 6 to 50 slm (single-gas); multi-gas models 7-8: 5,001 to 30,000 sccm (N2 equivalent)
• Accuracy: ≤ ±1% of set point from 25 to 100% of full scale; ≤ ±0.25% of full scale from 2 to 25% of full scale
• Repeatability: ≤ ±0.15% of full scale
• Response Time: ≤ 1.0 sec typical per SEMI E17-91 (over the whole control range)
• Gas Type: Multi-gas, field programmable; stores up to four gases with ten calibration points per gas
• Operating Pressure: Differential pressure 10 to 40 psiD (5-20 slm), 22 to 40 psiD (20-30 slm), 30 to 40 psiD (30-50 slm), N2 equivalent; max operating pressure 70 psiG; proof pressure 145 psiG
• Wetted Materials: Stainless steel type 316L and 316, PCTFE; electropolished and ultra-cleaned to 5 Ra
• Seals: All-metal (metal seal)
• Electrical Interface: Analog 0 to 5 VDC and digital (0 to 100%) modes; RS-485 two-wire half-duplex multi-drop with two RJ-11 ports; D-sub 9-pin; compact top (T) or side pigtail (Y) connector
• Heated Option: No (standard unheated version)
• Operating Temperature: 15 to 50 °C (59 to 122 °F)
• Control Range / Turndown: 2 to 100% of full scale
• Zero Stability: Less than 0.5% of full-scale flow over one year
• Dimensions: Compact (T/Y) outline: port-to-port 79.8 mm, height 127.4 mm (per outline drawing)
• Weight: 1.2 kg (2.6 lb)
• Power Supply: +15 VDC ±2% at 100 mA; -15 VDC ±2% at 40 mA; 2.1 W max
• Valve Type: Piezoelectric (normally-open or normally-closed)
• Leak Integrity: 1 x 10⁻¹⁰ atm-cc/sec (He) max; 1 x 10⁻¹¹ Pa-m³/sec (He) max

Installation Guide

• Mount the FC-DR986 in a clean, dry location. Keep it away from vibration and heat sources.
• Check differential pressure before installation. Match it to your flow range: 5-20 slm needs 10-40 psiD; 20-30 slm needs 22-40 psiD; 30-50 slm needs 30-40 psiD.
• Use the top (T) or side pigtail (Y) connector for easy cable routing.
• Connect the RS-485 two-wire half-duplex multi-drop line with two RJ-11 ports. Use the D-sub 9-pin for analog or digital signals.
• Do not exceed max operating pressure of 70 psiG. Proof pressure is 145 psiG.
• Keep the device within the operating temperature range of 15 to 50 °C.

Setup and Maintenance Convenience

• Program up to four gases in the field. Store ten calibration points per gas.
• Use the analog 0 to 5 VDC or digital 0 to 100% mode for fast setup.
• Zero stability stays below 0.5% of full-scale flow for one year. This reduces re-calibration needs.
• The all-metal seal design cuts wear and extends service life.
• Clean the wetted parts with care. They are electropolished and ultra-clean to 5 Ra.

Compatibility Notes

• The FC-DR986 works with standard semiconductor gas panels and IGS compact systems.
• It supports RS-485 multi-drop networks with two RJ-11 ports. This makes it easy to add to existing digital lines.
• The analog 0 to 5 VDC output fits common PLC and controller inputs.
• The compact top or side connector design fits tight spaces.
• This unit is the higher-flow variant of the FC-DR980 digital MFC.

Certifications

• RoHS compliant.
• References SEMI E17-91 for response time testing.

Package Contents

• One FC-DR986 digital mass flow controller.
• One outline drawing for compact (T/Y) dimensions.
• One quick start guide.
• One calibration certificate.

FAQ

Q: How do I program multiple gases?

A: Use the field-programmable feature. You can store up to four gases. Each gas has ten calibration points. Set the gas type through the digital interface.

Q: What differential pressure do I need for 50 slm?

A: For 30-50 slm, use 30 to 40 psiD (N2 equivalent). Do not go below 30 psiD for this flow range.

Q: Does this model come with a heater?

A: No. The standard version is unheated. It operates from 15 to 50 °C.

Q: Can I use this MFC in a multi-drop RS-485 network?

A: Yes. It has two RJ-11 ports for two-wire half-duplex multi-drop connections. This saves cabling and simplifies network setup.

Q: What is the response time in real use?

A: Typical response time is ≤ 1.0 sec over the whole control range. This meets SEMI E17-91. In practice, fast gas switching in etch and CVD steps works well.

Q: How often do I need to re-zero the device?

A: Zero stability stays under 0.5% of full-scale flow for one year. Most users re-zero once a year or when they change gas types.

Q: What should I do if the leak rate is higher than expected?

A: Check the all-metal seals first. The rated leak integrity is 1 x 10⁻¹⁰ atm-cc/sec (He). If readings are higher, inspect the seal surfaces and retighten the fittings.