FC-DR980 Series AERA FC-DR985 Metal-Sealed MFC for Semiconductor

Product Overview

FC-DR985 is a compact digital mass flow controller from the AERA FC-DR980 Series. It combines piezoelectric valve technology with a metal-sealed body. The device handles 10 sccm to 5 slm full-scale flow. Multi-gas and multi-range models support N2 equivalent ranges 1-6. It delivers fast response and stable control for semiconductor processes.

Technical Specifications

• Brand: AERA
• Model: FC-DR985
• Series: FC-DR980 (Digital, piezoelectric, metal-sealed, compact)
• Full-Scale Flow Range: 10 sccm to 5 slm (multi-gas/multi-range models 1-6, N2 equivalent)
• Accuracy: ≤ ±1% of set point from 25 to 100% FS; ≤ ±0.25% of FS from 2 to 25% FS
• Repeatability: ≤ ±0.15% of full scale
• Response Time: ≤ 1.0 sec typical per SEMI E17-91 (over the whole control range)
• Gas Type: Multi-gas, field programmable; stores up to four gases with ten calibration points per gas
• Operating Pressure: Differential pressure 7 to 40 psiD (49 to 275 kPaD); max operating pressure 70 psiG; proof pressure 145 psiG
• Wetted Materials: Stainless steel type 316L and 316, PCTFE; electropolished and ultra-cleaned to 5 Ra
• Seals: All-metal (metal seal)
• Electrical Interface: Analog 0 to 5 VDC and digital (0 to 100%) modes; RS-485 two-wire half-duplex multi-drop with two RJ-11 ports; D-sub 9-pin; compact top (T) or side pigtail (Y) connector
• Heated Option: No (standard unheated version)
• Operating Temperature: 15 to 50 °C (59 to 122 °F)
• Control Range / Turndown: 2 to 100% of full scale
• Zero Stability: Less than 0.5% of full-scale flow over one year
• Dimensions: Compact (T/Y) outline: port-to-port 79.8 mm, height 92.8 mm (per outline drawing)
• Weight: 1.2 kg (2.6 lb)
• Power Supply: +15 VDC ±2% at 100 mA; -15 VDC ±2% at 40 mA; 2.1 W max
• Valve Type: Piezoelectric (normally-open or normally-closed)
• Leak Integrity: 1 x 10⁻¹⁰ atm-cc/sec (He) max; 1 x 10⁻¹¹ Pa-m³/sec (He) max
• Compliance/Certification: RoHS; SEMI E17-91 referenced

Installation Guide

• Mount the device on a clean gas panel. Use the compact T or Y connector style.
• Keep differential pressure between 7 and 40 psiD for accurate control.
• Connect the RS-485 two-wire half-duplex line to the RJ-11 or D-sub 9-pin port.
• Apply +15 VDC and -15 VDC power within ±2% tolerance.
• Do not exceed 70 psiG operating pressure or 145 psiG proof pressure.
• Use only compatible gases. Program the gas type and range before operation.

Setup and Maintenance Ease

• Field-programmable multi-gas: store up to four gases with ten calibration points each.
• Built-in diagnostics help identify issues without removing the unit.
• Zero stability stays within 0.5% FS over one year, reducing recalibration needs.
• Metal-sealed body and electropolished wetted parts simplify cleaning and service.
• Compact outline fits tight gas panels and saves installation space.

Compatibility Notes

• Works with analog 0 to 5 VDC and digital 0 to 100% control modes.
• RS-485 multi-drop supports up to multiple devices on one two-wire bus.
• Fits standard SEMI E17-91 response time measurement practices.
• Designed for CVD, PVD, etch, diffusion, ion implantation, and sputtering gas panels.

Certification Information

• RoHS compliant for restricted hazardous substances.
• SEMI E17-91 referenced for response time testing.
• Leak integrity: 1 x 10⁻¹⁰ atm-cc/sec (He) max; 1 x 10⁻¹¹ Pa-m³/sec (He) max.

Packing List

• 1 x AERA FC-DR985 mass flow controller
• 1 x Outline drawing (per model)
• 1 x Calibration certificate (per order)
• 1 x Quick start guide

FAQ

• Q: Can I change the gas type in the field?
  A: Yes. The unit is field programmable. It stores up to four gases with ten calibration points each.
• Q: What pressure range keeps the controller stable?
  A: Keep differential pressure from 7 to 40 psiD. Do not exceed 70 psiG operating pressure.
• Q: How often does the zero point drift?
  A: Zero stability stays under 0.5% of full scale over one year.
• Q: Does this model come with heating?
  A: No. The standard FC-DR985 is unheated. It operates from 15 to 50 °C.
• Q: How fast does the controller respond?
  A: Response time is ≤ 1.0 sec typical across the whole control range, per SEMI E17-91.
• Q: What connector options are available?
  A: Choose compact top (T) or side pigtail (Y). Both include RS-485 and D-sub 9-pin.
• Q: Can I use this in a multi-drop network?
  A: Yes. The RS-485 two-wire half-duplex port supports multi-drop with two RJ-11 ports.