Product details
Product Overview
FC-D982 is the highest-flow model in the AERA FC-D980 Series. This digital piezoelectric mass flow controller delivers precise gas control for demanding semiconductor processes. A larger body and 3/8 in VCR fitting option support full-scale flow of 30 to 50 slm. All-metal sealing and double VAR 316L stainless steel construction protect gas purity. Multi-gas, field-programmable memory stores up to eight gases with eleven calibration points each.
Engineers choose the FC-D982 for fast response, tight accuracy, and long-term zero stability. The unheated standard version suits most CVD, PVD, etch, diffusion, ion implantation, and sputtering tools. Analog 0 to 5 VDC and RS-485 interfaces simplify integration into existing systems.
Technical Data
- Brand: AERA
- Model: FC-D982
- Series: FC-D980 Series (digital, piezoelectric, metal-sealed)
- Full-scale flow range: 30 to 50 slm
- Accuracy: Within +/-1% of set point from 25 to 100% of full scale; within +/-0.25% of full scale from 2 to 25% of full scale
- Repeatability: Within +/-0.2% of full scale
- Response time: Less than 1 sec to within +/-2% of set point
- Control range (turndown): 2 to 100% of full scale
- Zero stability: Less than 0.5% of full scale over one year
- Gas type: Multi-gas, field programmable; stores up to eight gases, up to 11 calibration points per gas
- Operating pressure: Differential pressure 28 to 40 psiD (194 to 275 kPaD); max operating pressure 70 psig (490 kPaG); proof pressure 140 psig (981 kPaG)
- Wetted materials: Double VAR type 316L stainless steel; standard fittings 1/4 in or 3/8 in VCR; electropolished and ultra-cleaned to 1 Ra (0.025 um)
- Seals: All-metal (metal seal)
- Valve type: Piezoelectric (normally-open or normally-closed)
- Leak integrity: 1 x 10^-10 atm-cc/sec (He) max
- Electrical interface: Analog 0 to 5 VDC input/output plus RS-485; 20-pin Honda connector
- Heated option: No (standard unheated version)
- Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
- Dimensions: 142 x 38 x 183.8 mm (H x W x D; port-to-port 183.8 mm; per outline drawing)
- Weight: 1.8 kg (3.9 lb)
- Power supply: +15 VDC +/-2% at 120 mA min; -15 VDC +/-2% at 50 mA min; 1.3 W max
Installation Guide
- Mount the FC-D982 in any orientation. Keep the body clear for service access.
- Use 1/4 in or 3/8 in VCR fittings. Tighten to the fitting maker’s torque spec.
- Keep differential pressure between 28 and 40 psiD during operation.
- Do not exceed 70 psig operating pressure or 140 psig proof pressure.
- Connect the 20-pin Honda connector for analog and RS-485 signals.
- Feed clean, dry gas. Purge lines before first use to protect the metal seal.
- Confirm the +15 VDC and -15 VDC rails meet the minimum current values.
Setup and Maintenance Ease
- Field programming lets one unit serve up to eight gases. Swap recipes without pulling the device.
- Up to 11 calibration points per gas keep accuracy across the 2 to 100% control range.
- Zero drift stays under 0.5% of full scale per year. This cuts recalibration visits.
- The all-metal seal resists wear. Fewer seal swaps mean less downtime.
- Fast response under 1 sec shortens process tuning time.
- Standard unheated design removes heater wiring and thermal checks.
Compatibility Notes
- Works with standard semiconductor gas panels using VCR connections.
- Analog 0 to 5 VDC suits most legacy controllers. RS-485 supports digital networks.
- Fits tools built for the FC-D980 Series footprint. The larger body needs space check.
- Compatible with CVD, PVD, etch, diffusion, ion implantation, and sputtering tools.
- Multi-gas memory supports common process gases after field calibration.
Certification and Compliance
- RoHS compliant for restricted substance limits.
- Referenced to SEMI E17-91 for semiconductor equipment practice.
- Leak integrity tested to 1 x 10^-10 atm-cc/sec (He) max.
Packing List
- One AERA FC-D982 mass flow controller
- One 20-pin Honda mating connector
- One outline drawing and calibration record
- One safety and compliance sheet
- Protective caps on VCR ports
FAQ
Q: Which gas can I run first?
A: Any gas in your field-programmed list. Load the matching calibration curve before flow starts.
Q: How often should I check zero?
A: Once a year fits most fabs. Drift stays below 0.5% of full scale in that window.
Q: Why does my unit read low at startup?
A: Check differential pressure first. Below 28 psiD, flow can sag. Also confirm warm-up time.
Q: Can I swap a heated unit for this one?
A: Only if your process tolerates an unheated body. Check condensation risk on cold gas lines.
Q: What causes a slow response?
A: Long tubing runs and clogged filters add lag. Keep lines short and filters clean.
Q: How do I add a new gas?
A: Program it in the field through the RS-485 link. Store up to 11 points per gas.
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