Product details
Product Overview
FC-780C is a 3-digit analog mass flow controller from the AERA FC-7800 Series. It uses a metal-sealed design for corrosive and inert gases. The compact body fits industry-standard footprints. Response is fast. Accuracy stays tight. This makes it a solid choice for semiconductor process tools.
The unit controls flow from 2% to 100% of full scale. Full-scale range covers 10 sccm to 5 slm. A normally-closed solenoid valve gives safe shutoff. The 20-pin Aera card-edge connector simplifies integration. RoHS compliance supports modern fab requirements.
Key Benefits
- Accurate control: within +/-1% of full scale.
- Stable output: repeatability within +/-0.2% of full scale.
- Fast settling: under 1 second between set points.
- Corrosive gas ready: 316L stainless steel and PTFE wetted parts.
- Leak tight: 1 x 10^-10 atm-cc/sec (He) max.
Technical Data
- Brand: AERA
- Model: FC-780C
- Series: FC-7800 Series (3-digit analog, metal-sealed)
- Module type: Analog mass flow controller (MFC)
- Full-scale flow range: 10 sccm to 5 slm
- Control range / turndown: 2 to 100% of full scale
- Accuracy: <= +/-1% of full scale
- Linearity: <= +/-0.5% of full scale
- Repeatability: <= +/-0.2% of full scale
- Response time: < 1 sec flow-settling time between set points
- Zero stability: less than 0.5% of full-scale flow over one year
- Gas type: all inert and corrosive gases
- Operating pressure: differential pressure 7 to 40 psiD; normal operating pressure 70 psig; maximum inlet pressure 140 psig
- Wetted materials: stainless steel type 316(L) and 316, PTFE
- Seals: metal (316L)
- Valve type: solenoid, normally-closed (‘C’ suffix)
- Leak integrity: 1 x 10^-10 atm-cc/sec (He) max
- Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
- Power supply: +15 VDC +/-2% at 25 mA; -15 VDC +/-2% at 180 mA; 3.1 W max
- Heated option: no (standard unheated version)
- Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
- Dimensions (H×W×D): 122 x 32 x 124 mm
- Weight: 1.0 kg (2.2 lb)
- Compliance / certification: RoHS
Installation Guide
- Mount the MFC on a clean, dry gas line.
- Keep the unit level. Allow space for the card-edge connector.
- Use the 20-pin Aera connector for command and output.
- Check differential pressure stays between 7 and 40 psiD.
- Keep inlet pressure below 140 psig.
- Confirm +15 VDC and -15 VDC supply before power-up.
- Purge the line with dry inert gas before first run.
Setup and Maintenance
- Set zero at no flow after warm-up.
- Use the 0 to 5 VDC signal for simple loop checks.
- Response settles in under 1 second, so tuning is quick.
- Metal seals resist corrosive gas attack.
- Zero drift stays under 0.5% of full scale per year.
- Schedule routine leak checks for safety.
Compatibility Notes
- Works with standard analog 0 to 5 VDC control systems.
- Fits industry-standard MFC footprints for easy swap.
- Handles inert and corrosive gases in one body.
- Suited to CVD, PVD, etch, diffusion, ion implantation and sputtering.
Certification
- RoHS: compliant.
- Leak integrity: tested to 1 x 10^-10 atm-cc/sec (He) max.
Packing List
- 1 x AERA FC-780C mass flow controller
- 1 x protective connector cap
- 1 x quick-start guide
- 1 x calibration certificate
FAQ
Q: What gases can this model handle?
A: It works with all inert and corrosive gases. The 316L stainless steel and PTFE wetted parts protect against attack.
Q: How fast does the flow settle?
A: Settling time is under 1 second between set points. Most loops need no extra tuning.
Q: Can I use it in a corrosive line?
A: Yes. Metal seals and 316L parts suit corrosive service. Check gas compatibility first.
Q: What signal does it use?
A: It uses analog 0 to 5 VDC for command and output. The 20-pin Aera card-edge connector carries both.
Q: From experience, what causes zero drift?
A: Thermal cycling and dirty gas lines are common causes. Warm up the unit and purge lines to keep zero stable.
Q: How do I avoid leak problems during install?
A: Use clean fittings and correct torque. Check the line after each change. A quick helium check catches small leaks early.
Q: Does it come heated?
A: No. This is the standard unheated version. Add heat only if your process needs it.
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