Product details
Product Description
The FC-782 is a high-flow analog mass flow controller from AERA. It belongs to the FC-7800 Series, a 3-digit metal-sealed line. This unit covers 35 slm to 150 slm full scale. It suits high-flow, corrosive and inert gas duty. Typical users are semiconductor fabs. Common processes include CVD, PVD, etch, diffusion, ion implantation and sputtering.
The body is larger than standard 3-digit models. The connector is an Aera 20-pin card-edge type. The valve is a solenoid, normally-open or normally-closed. Seals are metal 316L. Wetted parts are 316(L) stainless steel and PTFE. The design handles reactive gases with low leak risk. Leak integrity is 1 x 10^-10 atm-cc/sec (He) max. The unit is RoHS compliant. The standard version is unheated.
Accuracy is within +/-2% of full scale. Repeatability is within +/-0.2% of full scale. Response time is under 3 seconds to within +/-2% of full scale between set points. Control range is 2 to 100% of full scale. This gives a 50:1 turndown. Linearity is within +/-1% of full scale. Zero drift stays under 0.5% of full scale per year. These numbers support stable, repeatable gas delivery.
The electrical interface is analog 0 to 5 VDC command and output. Power needs +15 VDC at 25 mA and -15 VDC at 200 mA. Maximum power draw is 3.5 W. Differential pressure should stay between 21 and 40 psiD. Normal operating pressure is 70 psig. Maximum inlet pressure is 140 psig. Operating temperature range is 5 to 45 degrees C (41 to 113 degrees F). The unit weighs 2.27 kg (5.0 lb). Dimensions are 149 x 38 x 183.8 mm (H x W x D).
Technical Data
- Brand: AERA
- Model: FC-782
- Series: FC-7800 Series (3-digit analog, metal-sealed)
- Module type: Analog mass flow controller, high-flow
- Full-scale flow range: 35 slm to 150 slm
- Accuracy: within +/-2% of full scale
- Repeatability: within +/-0.2% of full scale
- Response time: under 3 seconds to within +/-2% of full scale
- Linearity: within +/-1% of full scale
- Resolution and control range: 2 to 100% of full scale (50:1 turndown)
- Zero stability: under 0.5% of full scale per year
- Gas type: all inert and corrosive gases
- Operating pressure: differential 21 to 40 psiD; normal 70 psig; max inlet 140 psig
- Temperature range: 5 to 45 degrees C (41 to 113 degrees F)
- Environmental tolerance: metal-sealed body for corrosive service; RoHS compliant
- Noise immunity: analog 0 to 5 VDC interface with shielded card-edge wiring
- Wetted materials: 316(L) stainless steel and PTFE
- Seals: metal 316L
- Valve type: solenoid, normally-open or normally-closed
- Leak integrity: 1 x 10^-10 atm-cc/sec (He) max
- Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
- Power supply: +15 VDC +/-2% at 25 mA; -15 VDC +/-2% at 200 mA; 3.5 W max
- Heated option: no (standard unheated version)
- Dimensions: 149 x 38 x 183.8 mm (H x W x D)
- Weight: 2.27 kg (5.0 lb)
Installation Guide
- Mount the unit in a level position. Keep the flow direction arrow aligned with the gas line.
- Set differential pressure between 21 and 40 psiD. Stay below 140 psig inlet.
- Flush the line before connection. Keep particles out of the inlet.
- Use the Aera 20-pin card-edge connector. Route the cable away from power lines.
- Check +15 VDC and -15 VDC rails before power-up. Confirm current limits.
- Warm up the unit before calibration checks. Let it reach steady temperature.
- Leak-test all joints with helium. Target the rated leak integrity.
Setup and Maintenance Ease
- The 0 to 5 VDC interface makes bench setup simple. No digital protocol is needed.
- The card-edge connector allows fast swap in dense gas panels.
- Zero and span trim are accessible for routine checks.
- Metal seals resist corrosion. This cuts seal replacement frequency.
- Annual zero check is enough in most clean processes.
- Keep spare connectors and cables on hand. This shortens downtime.
Compatibility Notes
- Works with Aera 20-pin card-edge cables and standard analog controllers.
- Fits FC-7800 Series mounting patterns. The larger body needs extra clearance.
- Suitable for CVD, PVD, etch, diffusion, ion implantation and sputtering tools.
- Handles inert and corrosive gases. Confirm gas compatibility before use.
- Not for heated service. Choose a heated model if condensation is a risk.
- Analog 0 to 5 VDC host must match the command and output scale.
Certification and Compliance
- RoHS: compliant
- Leak integrity: 1 x 10^-10 atm-cc/sec (He) max
- Lifecycle status: current; official product pages active as of 2026-11
Packing List
- 1 x AERA FC-782 mass flow controller
- 1 x calibration certificate
- 1 x safety and compliance note
- 1 x connector wiring reference
- Note: cable and mating connector sold separately unless stated on the order.
FAQ
Q: Can this unit control corrosive gases?
A: Yes. The wetted path uses 316L stainless steel and PTFE. Metal seals add protection. Check your gas list against these materials first.
Q: What differential pressure does it need?
A: Keep it between 21 and 40 psiD. Lower pressure may limit full-scale flow. Higher inlet pressure is fine up to 140 psig.
Q: How often should I check zero?
A: Once a year is typical in clean duty. Zero drift stays under 0.5% of full scale per year. Check sooner after gas supply changes.
Q: Why does my flow reading drift after a cable swap?
A: The card-edge connector may sit loose. Reseat it and check shield ground. Also confirm both 15 VDC rails under load.
Q: Can I replace a smaller 3-digit MFC with this one?
A: Often yes, but plan for space. The FC-782 body is larger. Match the 20-pin connector and the 0 to 5 VDC scale.
Q: Is a heated version available?
A: This model is unheated. Pick a heated unit if your gas may condense in the line.
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