FC-780HT AERA Heated Metal-Sealed Digital MFC for Vapor Control

FC-780HT Heated Metal-Sealed Digital MFC by AERA

The FC-780HT is a heated, all-metal-sealed digital mass flow controller. It belongs to the FC-780 Series. It is built for precise vapor control of liquid sources in semiconductor processes. Moreover, the FC-780HT combines a heated gas body, metal seals, and digital communication. Therefore, it delivers stable performance for demanding vapors such as TEOS, HCD, BTBAS, SiCl4, TiCl4, 3DMAS, HMDS, and H2O. The FC-780HT supports full-scale flows from 10 sccm to 5 slm (N2 equivalent). Accuracy is within +/-1% of full scale. In addition, repeatability is within +/-0.2% of full scale. Response time is under 1 second to within +/-2% of full scale. The FC-780HT features a normally-open or normally-closed solenoid valve. It offers RS-485 digital and 0 to 5 VDC analog interfaces. Furthermore, the heated body runs at 50 to 80 degrees C. A special version reaches 90 degrees C. The electronics stay at 15 to 50 degrees C. This FC-780HT model suits liquid-source vapor control in semiconductor processing. Finally, it meets RoHS compliance.

Technical Data

• Brand: AERA
• Model: FC-780HT
• Series: FC-780 Series (Heated, metal-sealed digital MFC)
• Measurement Range (Full-Scale Flow): 10 sccm to 5 slm (N2 equivalent)
• Accuracy: <= +/-1% of full scale
• Repeatability: <= +/-0.2% of full scale
• Response Time (Frequency Response): < 1 sec to within +/-2% of full scale
• Sensitivity (Zero Stability): Automatic zero correction; zero log for instantaneous flow, cumulative flow, and zero
• Linearity: <= +/-0.5% of full scale
• Resolution (Control Range / Turndown): 2 to 100% of full scale
• Temperature Range:
  • Electronics PCB: 15 to 50 degrees C
  • Heated gas body: 50 to 80 degrees C (special version up to 90 degrees C)
• Environmental Tolerance (Operating Pressure): Differential pressure 49 to 275 kPaD; maximum pressure 980 kPa
• Interference Resistance (Electrical Interface): Digital RS-485 (0 to 100%) plus analog 0 to 5 VDC input/output; modular connector
• Gas Type: Vapors of liquid sources: TEOS, HCD, BTBAS, SiCl4, TiCl4, 3DMAS, HMDS, H2O
• Wetted Materials: SUS316L, SUS316, PTFE, and alloy
• Seals: All-metal (metal seal)
• Valve Type: Solenoid (normally-open or normally-closed)
• Leak Integrity: 1 x 10^-9 Pa-m3/sec (He) max (metal-sealed)
• Power Supply: +15 VDC +/-2% at 100 mA; -15 VDC +/-2% at 200 mA; 4.5 W
• Dimensions: Body approx 84 x 38.2 x 124 mm (separate heated body and PCB modules; per outline drawing)
• Weight: Heated body 1.1 kg; PCB module 0.2 kg
• Compliance / Certification: RoHS

Installation Guide

• Mount the heated body and PCB module separately. Then follow the outline drawing for dimensions.
• Keep the electronics PCB within 15 to 50 degrees C. Also, do not expose it to heated gas body temperatures.
• Use the modular connector for RS-485 digital and 0 to 5 VDC analog signals.
• Apply +15 VDC and -15 VDC power within the stated tolerances. Total power draw is 4.5 W.
• Check differential pressure between 49 and 275 kPaD. Moreover, never exceed 980 kPa maximum pressure.
• Confirm the valve type (normally-open or normally-closed) before wiring the control loop.
• Heat the gas body to 50 to 80 degrees C. For the special version, use up to 90 degrees C.

Setup and Maintenance Convenience

• Automatic zero correction reduces manual drift adjustment. Additionally, the zero log tracks instantaneous flow, cumulative flow, and zero events.
• The all-metal seal design supports leak integrity down to 1 x 10^-9 Pa-m3/sec (He) max.
• Separate heated body and PCB modules simplify service access. The PCB module weighs only 0.2 kg.
• RS-485 digital control plus analog input/output allows flexible integration.
• The FC-780HT handles corrosive and condensable vapors. As a result, this lowers maintenance risk in liquid-source delivery.

Compatibility Notes

• The FC-780HT works with liquid-source vapor delivery systems for TEOS, HCD, BTBAS, SiCl4, TiCl4, 3DMAS, HMDS, and H2O.
• Wetted materials include SUS316L, SUS316, PTFE, and alloy. Therefore, check chemical compatibility for your specific vapor.
• The modular connector supports RS-485 and 0 to 5 VDC analog control. Confirm host controller signal levels before connection.
• The normally-open or normally-closed solenoid valve must match your fail-safe strategy.
• Heated body temperatures of 50 to 80 degrees C suit most liquid-source vapors. In addition, a special 90 degrees C version is available.

Certification Information

• The FC-780HT meets RoHS compliance.
• Leak integrity is rated at 1 x 10^-9 Pa-m3/sec (He) max with metal seals.
• Product lifecycle status: Current. Official product pages were active as of 2026-11. Last verified: 2026-11.

Packing List

• 1 x FC-780HT heated metal-sealed digital MFC body (1.1 kg)
• 1 x PCB module (0.2 kg)
• 1 x Modular connector for RS-485 and analog signals
• 1 x Outline drawing for installation reference
• 1 x RoHS compliance statement

FAQ

• Q: Can I use the FC-780HT with TEOS vapor?
  • A: Yes. The FC-780HT is designed for TEOS and other liquid-source vapors. Moreover, the heated body helps prevent condensation.
• Q: What is the maximum heated body temperature?
  • A: The standard version reaches 80 degrees C. In addition, a special version goes up to 90 degrees C. Keep the PCB at 15 to 50 degrees C.
• Q: How fast does the FC-780HT respond to a setpoint change?
  • A: It responds in less than 1 second to within +/-2% of full scale.
• Q: Does the FC-780HT need manual zeroing?
  • A: No. It has automatic zero correction and a zero log. Therefore, this saves time during setup and routine checks.
• Q: Can I use analog control with the FC-780HT?
  • A: Yes. It offers 0 to 5 VDC analog input/output plus RS-485 digital communication.
• Q: What happens if my vapor line pressure exceeds the limit?
  • A: Never exceed 980 kPa maximum pressure. Also, keep differential pressure between 49 and 275 kPaD for stable control.
• Q: Is the FC-780HT suitable for H2O vapor?
  • A: Yes. H2O is listed among compatible vapors. Furthermore, the heated body reduces condensation risk.
• Q: How do I know if the FC-780HT is still supported?
  • A: The product lifecycle is Current. Official product pages were active as of 2026-11. Last verified: 2026-11.
• Q: My FC-780HT shows zero drift after months of use. What should I check?
  • A: Run the automatic zero correction first. Then check the zero log for cumulative flow. If drift persists, inspect the metal seal and confirm gas body temperature stability.
• Q: Can I replace the PCB module without removing the heated body?
  • A: The FC-780HT uses separate heated body and PCB modules. Consequently, this design simplifies module-level service. Follow your site procedures and the outline drawing.