AERA FC-781 Analog Mass Flow Controller, 316L Seals, 0-5 VDC

Product Description

FC-781 is a mid-flow, metal-sealed analog mass flow controller from the AERA FC-7800 Series. It delivers stable control for inert and corrosive gases. The 3-digit metal-sealed design suits semiconductor processes such as CVD, PVD, etch, diffusion, ion implantation, and sputtering.

• Full-scale flow range: 6 slm to 30/50 slm.
• Accuracy: within ±1% of full scale.
• Repeatability: within ±0.2% of full scale.
• Response time: flow settles in under 1 second between set points.
• Gas compatibility: all inert and corrosive gases.
• Seals: metal (316L) for harsh service.
• Wetted materials: stainless steel type 316(L), 316, and PTFE.
• Connector: Aera 20-pin card-edge connector.
• Compliance: RoHS.
• Typical application: semiconductor processing with corrosive and inert gases at mid flow.

Technical Specifications

• Brand: AERA
• Model: FC-781
• Series: FC-7800 Series (3-digit analog, metal-sealed)
• Full-scale flow range: 6 slm to 30/50 slm
• Accuracy: ≤ ±1% of full scale
• Repeatability: ≤ ±0.2% of full scale
• Linearity: ≤ ±0.5% of full scale
• Response time: < 1 sec flow-settling time between set points
• Control range / turndown: 2 to 100% of full scale
• Zero stability: less than 0.5% of full-scale flow over one year
• Gas type: all inert and corrosive gases
• Operating pressure: differential pressure 10 to 40 psid; normal operating pressure 70 psig; maximum inlet pressure 140 psig
• Wetted materials: stainless steel type 316(L) and 316, PTFE
• Seals: metal (316L)
• Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin Aera card-edge connector
• Heated option: No (standard unheated version)
• Operating temperature: 5 to 45 °C (41 to 113 °F)
• Dimensions: H × W × D = 128 × 38 × 151 mm
• Weight: 1.5 kg (3.3 lb)
• Power supply: +15 VDC ±2% at 25 mA; -15 VDC ±2% at 180 mA; 3.1 W max
• Valve type: solenoid (normally-open or normally-closed)
• Leak integrity: 1 × 10^-10 atm-cc/sec (He) max
• Compliance / certification: RoHS

Installation Guide

• Mount the FC-781 in a stable position. Keep the footprint clear for the 128 × 38 × 151 mm body.
• Use the Aera 20-pin card-edge connector for analog command and output.
• Apply +15 VDC and -15 VDC power within ±2% tolerance.
• Keep differential pressure between 10 and 40 psid.
• Do not exceed 140 psig inlet pressure.
• Confirm the gas path uses compatible wetted materials: 316(L), 316, and PTFE.

Setup and Maintenance Convenience

• The metal seal supports corrosive gas service with less seal wear concern.
• Zero stability stays within 0.5% of full scale over one year. This reduces re-zero frequency.
• Flow settles in under 1 second between set points. This helps fast process steps.
• The analog 0 to 5 VDC interface simplifies integration with existing controllers.
• The standard unheated version has no heater service needs.

Compatibility Notes

• Gas compatibility: all inert and corrosive gases within the stated materials and seal limits.
• Electrical compatibility: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector.
• Pressure compatibility: differential pressure 10 to 40 psid; normal operating pressure 70 psig; maximum inlet pressure 140 psig.
• Process compatibility: semiconductor CVD, PVD, etch, diffusion, ion implantation, and sputtering at mid flow.

Certification Information

• RoHS: compliant.
• Leak integrity: 1 × 10^-10 atm-cc/sec (He) max.

Packing List

• 1 × AERA FC-781 mass flow controller.
• 1 × product identification label with model and serial details.
• 1 × basic connection and safety note set.

FAQ

• Q: Which gas types can I use with the FC-781?
  A: You can use all inert and corrosive gases. Check that your gas path matches the wetted materials and metal seals.
• Q: What flow range does this model cover?
  A: It covers 6 slm to 30/50 slm full scale. The control range is 2 to 100% of full scale.
• Q: How fast does the controller respond?
  A: Flow settles in less than 1 second between set points.
• Q: What electrical signal does it use?
  A: It uses analog 0 to 5 VDC command and output through the Aera 20-pin card-edge connector.
• Q: Can I use this in a corrosive gas line?
  A: Yes. The metal (316L) seals and 316(L)/316 stainless steel wetted parts support corrosive gas service.
• Q: Does the FC-781 include a heater?
  A: No. The standard version is unheated.
• Q: How often should I check zero stability?
  A: Zero stability is less than 0.5% of full-scale flow over one year. Many users check zero during scheduled maintenance.
• Q: What pressure should I apply?
  A: Keep differential pressure between 10 and 40 psid. Normal operating pressure is 70 psig. Maximum inlet pressure is 140 psig.
• Q: What if my process needs a different valve state?
  A: The solenoid valve is available in normally-open or normally-closed versions. Confirm the correct option before ordering.
• Q: Is the FC-781 RoHS compliant?
  A: Yes. It meets RoHS requirements.
• Q: What maintenance is typical in the field?
  A: Field experience shows that stable zero and clean gas supply reduce drift. Inspect seals and connections during scheduled tool service.
• Q: How do I avoid wiring errors?
  A: Use the Aera 20-pin card-edge connector pinout. Verify +15 VDC and -15 VDC polarity before power-up.