UFC-1660 UNIT Instruments Metal Seal MFC | High Purity Analog UFC-1660

Meet the UFC-1660

• Model:
• Brand: UNIT Instruments
• Series: 1660 Series (high purity, metal seal, 16 micro-inch Ra)
• Type: Analog mass flow controller
• Role: The analog base model of the proven 1660 family.
• Why It Stands Out:
  • Clean metal-seal gas path for high-purity lines.
  • Well-known Unit 132 valve for steady control.
  • Simple 0-5 VDC analog hookup.
  • Wide flow span from 3 sccm to 30 slm.

Technical Data

• Flow Range: 3 sccm to 30 slm (N2 equivalent)
• Accuracy:
  • +/-1% FS above 35% FS
  • +/-0.35% FS below 35% FS (analog model)
• Repeatability: +/-0.15% FS (SEMI E56-96)
• Linearity: +/-0.5% FS (SEMI E27-92)
• Response Time:
  • 1.0 sec or less fast start settling (SEMI E17-91)
  • Soft start ramps at 20% per sec
• Control Range: 2% to 100% FS
• Zero Stability: 0.6% FS per year or less (no auto zero)
• Temperature Coefficient:
  • Zero: 0.05% FS per degree C
  • Span: 0.1% FS per degree C
• Pressure Coefficient: 0.007% of reading per psi (N2)
• Gas Type: All non-corrosive and mildly corrosive process gases; N2-calibrated at the factory
• Operating Pressure:
  • Max working: 3,500 kPa (500 psi)
  • Proof: 10,500 kPa (1,500 psi)
  • Differential: 6.65 to 350 kPa (50 torr to 50 psid)
• Wetted Parts: 316L SS, K-M43, 304, 7Mo; finish 16 micro-inch Ra (10 micro-inch option)
• Seals: Metal C-seal or W-seal; Kel-F or metal seat
• Electrical Interface: Analog only
  • 0-5 VDC setpoint and monitor
  • 20-pin card edge, or 9/15-pin D-sub
  • Auto zero option
• Heated Option: None (standard unit is unheated)
• Operating Temperature: 0 to 50 degrees C (32 to 122 degrees F)
• Dimensions: About 137 x 127 x 38 mm (H x W x D); 1.5 in footprint; 1/4 VCR length 124 mm
• Weight: 1.2 kg (2.65 lb)
• Power: +15 VDC (100 mA max), -15 VDC (200 mA max); 4.5 W max
• Valve: Proportional electromagnetic (Unit 132); NC or NO solenoid
• Leak Integrity: 1 x 10^-10 atm-cc/sec He (SEMI E16-90)

Where It Fits Best

• Tools:
  • Plasma etch chambers
  • CVD and diffusion furnaces
  • EPI reactors
  • Sputter systems
• Jobs:
  • High-purity gas delivery
  • Steady recipe flow
  • Retrofit of analog MFC lines
• Systems:
  • 0-5 VDC analog controllers
  • Legacy tools with card edge or D-sub ports

Install and Setup Tips

• Keep differential pressure inside 6.65 to 350 kPa.
• Stay under 500 psi working pressure.
• Mount in the flow direction shown on the body.
• Use clean, dry gas to protect the metal seat.
• Let the unit sit at 0 to 50 degrees C.
• Wire setpoint and monitor to the 0-5 VDC pins.

Care and Uptime

• No auto zero on this analog base model; check zero at set intervals.
• Zero drift stays low at 0.6% FS per year.
• Metal seals last long in clean service.
• 16 micro-inch Ra finish cuts particle traps.

Fit and Compatibility

• Works with analog 0-5 VDC hosts only.
• No digital bus on this model.
• Choose 10 micro-inch Ra if your spec is tighter.
• 1/4 VCR fittings match common high-purity lines.

Certification

• CE certified.
• Meets SEMI E12, E16, E17, E27 and E56.
• NIST-traceable calibration.

Packing List

• 1 x UNIT Instruments UFC-1660 flow controller
• 1 x Mating connector (card edge or D-sub per order)
• 1 x Calibration certificate
• 1 x Outline drawing

FAQ

• Q: Is this a digital unit?
  • A: No. The UFC-1660 is analog only, with 0-5 VDC signals.
• Q: How tight is control at low flow?
  • A: Below 35% FS, accuracy holds at +/-0.35% FS, which suits low-rate recipes.
• Q: What finish do I get?
  • A: Standard is 16 micro-inch Ra. A 10 micro-inch option is available on request.
• Q: From field use, what causes zero shift?
  • A: Mostly temperature swings and long run time. A periodic zero check solves most cases.
• Q: Can it replace an older MFC in my tool?
  • A: Often yes. The same 1.5 in footprint and 1/4 VCR layout ease drop-in swaps.