Product details
Product Overview
FC-772 is a high-flow analog mass flow controller from the AERA FC-7700 Series. It handles 35 slm to 150 slm full-scale flow. The 3-digit elastomer-sealed design suits high-flow, non-corrosive gas lines. A larger body and a 20-pin Aera card-edge connector make integration simple. Typical users are semiconductor fabs running CVD, PVD, etch, diffusion, ion implantation, and sputtering.
- Brand: AERA
- Model: FC-772
- Series: FC-7700 Series (3-digit analog, elastomer-sealed)
- Module type: Analog mass flow controller
Technical Data
- Brand: AERA
- Model: FC-772
- Full-scale flow range: 35 slm to 150 slm
- Accuracy: within plus or minus 2% of full scale
- Repeatability: within plus or minus 0.2% of full scale
- Response time: under 3 sec to within plus or minus 2% of full scale between set points
- Linearity: within plus or minus 1% of full scale
- Resolution and turndown: control range 2% to 100% of full scale
- Zero stability: under 0.5% of full-scale flow over one year
- Gas type: all inert gases, such as N2, O2, Ar, and He
- Operating pressure: differential 21 to 40 psiD; normal 70 psig; maximum inlet 140 psig
- Wetted materials: 316(L) stainless steel, PTFE, magnetic stainless
- Seals: elastomer, fluoroelastomer or chloroprene rubber
- Valve type: solenoid, normally-open or normally-closed
- Leak integrity: 1 x 10^-6 atm-cc/sec (He) max
- Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
- Power supply: +15 VDC plus or minus 2% at 25 mA; -15 VDC plus or minus 2% at 200 mA; 3.5 W max
- Heated option: no, standard unheated version
- Temperature range: 5 to 45 degrees C (41 to 113 degrees F)
- Environmental tolerance: indoor, clean, non-corrosive gas service
- Interference resistance: shielded analog signal path with a card-edge connector
- Dimensions (H x W x D): 149 x 38 x 183.8 mm
- Weight: 2.27 kg (5.0 lb)
Installation Guide
- Mount the unit on a stable, level surface near the gas line.
- Keep inlet pressure at or below 140 psig.
- Hold differential pressure between 21 and 40 psiD.
- Flush the line before you connect the controller.
- Use clean, dry inert gas only.
- Plug the 20-pin card-edge connector into the Aera slot.
- Check +15 VDC and -15 VDC supply polarity before power-on.
- Keep cables away from high-current wiring to cut noise.
- Confirm 0 to 5 VDC command and output levels at start-up.
- Run a zero check with no flow before you set the process point.
Setup and Maintenance Ease
- Analog 0 to 5 VDC interface needs no digital setup tool.
- The 20-pin connector allows fast swap in the field.
- Zero drift stays under 0.5% of full scale per year.
- Fewer recalibration trips mean less downtime.
- The unheated body keeps service steps simple.
- Standard elastomer seals are easy to source.
Compatibility Notes
- Works with Aera controllers that use the 20-pin card-edge interface.
- Fits gas panels built for the FC-7700 Series footprint.
- Suited to inert gas lines: N2, O2, Ar, and He.
- Not for corrosive or reactive gases.
- Pairs with 0 to 5 VDC analog command sources.
- Needs a dual +15 VDC and -15 VDC supply.
Certification and Compliance
- RoHS: compliant
- Leak integrity: 1 x 10^-6 atm-cc/sec (He) max
- Lifecycle status: current, official product pages active as of 2026-11
Packing List
- 1 x AERA FC-772 mass flow controller
- 1 x protective shipping carton
- 1 x documentation set
- Note: confirm cable and accessory items with your order.
FAQ
Q: Which gases can I run through this controller?
A: Use inert gases only, such as N2, O2, Ar, and He. Corrosive gases will damage the wetted parts.
Q: How fast does the unit reach a new set point?
A: It settles within plus or minus 2% of full scale in under 3 seconds. Most process steps see a smooth ramp.
Q: What supply does the board need?
A: It needs +15 VDC at 25 mA and -15 VDC at 200 mA. Total draw stays at 3.5 W or less.
Q: Can I mount it in any position?
A: Keep the body level and stable. This protects the sensor and keeps zero drift low.
Q: How often should I check zero?
A: Zero drift stays under 0.5% of full scale per year. Many fabs check zero at each tool qual.
Q: Why does my flow reading drift after a year?
A: Small zero shifts are normal over time. Re-zero the unit and check inlet pressure first. If drift continues, inspect the seals.
Q: The valve will not open. What should I check?
A: Check both 15 VDC rails and the 20-pin connector seat. Also confirm the command signal reaches 0 to 5 VDC.
Q: Can I replace an older FC-7700 unit with this model?
A: Yes, if the panel uses the same 20-pin card-edge interface and footprint. Verify pressure and flow range first.
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