FC-771A Analog Mass Flow Controller AERA FC-7700 Series

Product Overview

FC-771A is a mid-flow analog mass flow controller from the AERA FC-7700 Series. It uses a 3-digit elastomer-sealed design. The unit controls inert gases from 6 slm up to 30 or 50 slm. It suits semiconductor processes such as CVD, PVD, etch, diffusion, ion implantation and sputtering. The valve comes in normally-open or normally-closed form. The analog 0 to 5 VDC interface keeps system integration simple.

Technical Data

• Brand: AERA
• Model: FC-771A
• Series: FC-7700 Series (3-digit analog, elastomer-sealed)
• Full-scale flow range: 6 slm to 30/50 slm
• Accuracy: within +/-2% of full scale
• Repeatability: within +/-0.2% of full scale
• Linearity: within +/-0.5% of full scale
• Response time: under 3 sec to within +/-2% of full scale between set points
• Control range / turndown: 2 to 100% of full scale
• Zero stability: under 0.5% of full-scale flow over one year
• Gas type: all inert gases (for example N2, O2, Ar, He)
• Operating pressure: differential 10 to 40 psiD
• Normal operating pressure: 70 psig
• Maximum inlet pressure: 140 psig
• Wetted materials: stainless steel type 316(L), PTFE, magnetic stainless
• Seals: elastomer (fluoroelastomer or chloroprene rubber)
• Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
• Heated option: no (standard unheated version)
• Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Valve type: solenoid (normally-open or normally-closed)
• Leak integrity: 1 x 10^-6 atm-cc/sec (He) max
• Power supply: +15 VDC +/-2% at 25 mA; -15 VDC +/-2% at 180 mA; 3.1 W max
• Dimensions (H x W x D): 128 x 38 x 151 mm
• Weight: 1.5 kg (3.3 lb)
• Compliance: RoHS
• Lifecycle status: current, official product pages active as of 2026-11 (last verified 2026-11)

Key Benefits

• Mid-flow coverage. One model covers 6 to 50 slm.
• Stable control. Tight linearity and repeatability support repeatable processes.
• Fast response. The unit settles within 3 sec between set points.
• Simple interface. Analog 0 to 5 VDC works with most legacy tools.
• Serviceable design. The elastomer seal and 20-pin connector ease field work.

Installation Guide

• Mount the body on a flat, clean surface. Keep the 128 x 38 x 151 mm footprint in mind.
• Flush the line before you connect the FC-771A. Keep particles out of the flow path.
• Set differential pressure between 10 and 40 psiD. Do not exceed 140 psig inlet pressure.
• Use the Aera 20-pin card-edge connector for command and output signals.
• Feed +15 VDC and -15 VDC within +/-2%. Respect the 3.1 W max draw.
• Keep ambient temperature between 5 and 45 degrees C.
• Use only inert gases. Avoid corrosive media in this standard version.

Setup and Maintenance

• Zero the unit after warm-up. Check zero drift once a year.
• Verify 0 to 5 VDC output against a known flow reference at two points.
• Replace elastomer seals when leak integrity drops below 1 x 10^-6 atm-cc/sec (He).
• Log pressure and temperature. This helps spot drift early.
• The card-edge connector allows quick swap without re-piping.

Compatibility Notes

• Works with inert gases such as N2, O2, Ar and He.
• Fits tools that accept analog 0 to 5 VDC setpoints.
• The 20-pin card-edge connector matches Aera FC-7700 Series cabling.
• Not for corrosive gases or heated applications.

Certification and Compliance

• RoHS: compliant.
• Leak integrity: 1 x 10^-6 atm-cc/sec (He) max.

Packing List

• 1 x FC-771A mass flow controller
• 1 x Quick start guide
• 1 x Calibration certificate
• 1 x Protective cap set

FAQ

• Q: Which gases can I use?
  Use inert gases only. Common choices are N2, O2, Ar and He.
• Q: What flow range does this model cover?
  It covers 6 slm up to 30 or 50 slm, depending on the configured full scale.
• Q: How do I connect it to my tool?
  Use the Aera 20-pin card-edge connector. Signals are analog 0 to 5 VDC.
• Q: Does it need a heated jacket?
  No. This is the standard unheated version. Keep ambient temperature between 5 and 45 degrees C.
• Q: How often should I check zero?
  Check zero after warm-up. Then verify it once a year. Zero drift stays under 0.5% of full scale per year.
• Q: From experience, what causes flow drift on these units?
  Dirty gas lines and seal wear are common causes. Flush lines before install. Replace seals when leak rate rises.
• Q: My output reads low at high setpoints. What should I check?
  Check differential pressure first. Low pressure starves the valve. Then confirm the 0 to 5 VDC command source.
• Q: Can I swap the valve without draining the line?
  Plan the layout so you can isolate the unit. Use shutoff valves on both sides. This makes seal service faster.