AERA FC-780 Metal-Sealed MFC | Corrosive Gas Flow Control

FC-780 Metal-Sealed Analog Mass Flow Controller by AERA

The FC-780 is a 3-digit analog mass flow controller from the FC-7800 Series. AERA built it for corrosive and inert gas lines. The metal seal suits harsh processes. The 20-pin card-edge connector fits existing tool racks. Install it fast, run it long.

Why This Model Stands Out

• Metal-sealed body handles corrosive gases without seal decay.
• Industry-standard footprint drops into current gas panels.
• Fast settling keeps set-point changes under one second.
• Tight linearity holds flow response stable across the range.
• RoHS compliant meets current environmental rules.

Technical Data

• Brand: AERA
• Model: FC-780
• Series: FC-7800 Series (3-digit analog, metal-sealed)
• Full-scale flow range: 10 sccm to 5 slm
• Accuracy: within plus or minus 1% of full scale
• Repeatability: within plus or minus 0.2% of full scale
• Linearity: within plus or minus 0.5% of full scale
• Response time: under 1 second settling time between set points
• Control range (turndown): 2% to 100% of full scale
• Zero stability: under 0.5% of full-scale flow per year
• Gas type: all inert and corrosive gases
• Operating pressure: differential 7 to 40 psiD; normal 70 psig; maximum inlet 140 psig
• Wetted materials: 316(L) and 316 stainless steel, PTFE
• Seals: metal, 316L
• Valve type: solenoid, normally open
• Leak integrity: 1 x 10^-10 atm-cc/sec (He) max
• Electrical interface: analog 0 to 5 VDC command and output; Aera 20-pin card-edge connector
• Power supply: +15 VDC at 25 mA; -15 VDC at 180 mA; 3.1 W max
• Heated option: no, standard unheated version
• Operating temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Dimensions: 122 x 32 x 124 mm (H x W x D)
• Weight: 1.0 kg (2.2 lb)
• Certification: RoHS

Installation Guide

• Mount the unit on a flat gas panel. Use the standard bolt pattern.
• Keep inlet pressure at or below 140 psig.
• Hold differential pressure between 7 and 40 psiD.
• Plug the 20-pin card-edge connector into the Aera slot.
• Feed clean +15 VDC and -15 VDC rails. Check current draw first.
• Run a zero check before opening process gas.

Setup and Service Convenience

• The analog 0 to 5 VDC signal needs no protocol setup.
• Zero trim takes one adjustment. Drift stays low for a full year.
• The metal seal resists corrosion. Service intervals stretch out.
• The normally-open valve fails safe on signal loss.
• Compact size eases swap-out in tight racks.

Compatibility Notes

• Fits tools wired for the Aera 20-pin card-edge connector.
• Works with inert and corrosive gas supply lines.
• Drops into panels sized for the industry-standard footprint.
• Pairs with standard 0 to 5 VDC analog controllers.

Certification

• RoHS compliant.

Typical Applications

• CVD and PVD tools
• Etch chambers
• Diffusion furnaces
• Ion implantation
• Sputtering lines

Packing List

• One FC-780 mass flow controller
• One product data sheet
• One calibration record

FAQ

• Q: Can this unit handle chlorine or other corrosive gases?
  A: Yes. The 316L metal seal and stainless body resist attack.
• Q: Does it need a heater for low-vapor gases?
  A: No. This is the unheated version. Add heat only if your process demands it.
• Q: How often should I re-zero the flow?
  A: Once a year is enough. Drift stays under half a percent.
• Q: What happens if the control signal drops out?
  A: The normally-open solenoid valve opens. Gas flow goes to full scale, so plan a safety interlock.
• Q: Will it fit my old Aera rack?
  A: Most likely yes. The 20-pin card-edge connector and footprint match common Aera layouts. Check pin wiring first.
• Q: Can I run it below 2% of full scale?
  A: No. Control holds only from 2% to 100% of full scale.