UFC-1665 UNIT Instruments MultiFlo Digital MFC for DeviceNet Networks

UFC-1665 MultiFlo Digital MFC from UNIT Instruments

The UFC-1665 is a digital mass flow controller. It comes from the 1665 Series of UNIT Instruments. This model uses MultiFlo technology. You can program the full scale in the field. It connects to a DeviceNet or PROFIBUS network. Metal seals give very low leak rates. The body is small and fits a 1.5 inch footprint. This unit is the unheated standard version.

Core Identity

• Brand: UNIT Instruments
• Model: UFC-1665
• Series: 1665 Series (MultiFlo Digital, DeviceNet / PROFIBUS)
• Type: Networked digital mass flow controller

Flow and Control

• Full-scale range
  • 3 sccm to 30 slm (N2 equivalent)
  • MultiFlo lets you set full scale from 33% to 100%
• Accuracy
  • ±1% of setpoint above 35% FS
  • ±0.35% FS below 35% FS
  • 32-point calibration for each gas
• Repeatability
  • ±0.15% FS (per SEMI E56-96)
• Speed
  • Fast start in ≤1.0 sec (per SEMI E17-91)
  • You can set response from under 1 sec up to 20 sec
• Control range
  • 2% to 100% of full scale
  • Linearity: ±0.5% FS (per SEMI E27-92)
  • Zero stability: ≤0.6% FS per year; auto-zero is standard

Gas, Pressure, and Temperature

• Gas type
  • Unlimited process gases
  • MultiFlo is field-programmable for each gas
• Pressure
  • Max operating: 3,500 kPa (500 psi)
  • Proof pressure: 10,500 kPa (1,500 psi)
  • Differential: 6.65 to 350 kPa (50 torr to 50 psid)
• Temperature
  • Operating: 0 to 50 °C (32 to 122 °F)
  • Zero drift: 0.05% FS/°C
  • Span drift: 0.1% FS/°C
• Pressure effect
  • 0.007% of reading per psi (N2)

Materials and Seals

• Wetted parts
  • 316L stainless steel, K-M43, 304, and 7Mo
  • Surface finish: 16 micro-inch Ra standard; 10 micro-inch optional
• Seals
  • Metal seal (C-seal or W-seal)
  • Seat: Kel-F or metal
• Leak integrity
  • 1 × 10⁻¹⁰ atm-cc/sec He (per SEMI E16-90)

Network and Power

• Interface
  • DeviceNet (ODVA-compliant) or PROFIBUS DP
• Power for DeviceNet
  • +11 to 25 VDC; 600 mA at 12 V, 300 mA at 24 V
• Power for PROFIBUS
  • ±15 VDC, 500 mA max each
• Power draw
  • 7.2 W max

Valve and Size

• Valve
  • Proportional electromagnetic (Unit 132 valve)
  • Normally closed or normally open solenoid
• Dimensions
  • About 137 × 127 × 38 mm (H × W × D)
  • 1.5 inch footprint; 1/4 VCR overall length 124 mm
• Weight
  • 1.2 kg (2.65 lb)
• Heated option
  • No (standard unheated version)

Where It Fits

• Gas delivery systems in semiconductor fabs that run DeviceNet or PROFIBUS networks
• Tools that need one controller for many gases, thanks to MultiFlo programming
• Skids and panels where a small 1.5 inch footprint saves space
• Lines that need very low leak rates and metal seals
• Upgrade paths for 1660 family users who move to digital control

Easy Setup and Service

• Auto-zero runs on its own. This cuts manual trim work.
• Network setup uses standard ODVA or PROFIBUS tools. No special software is needed.
• The 32-point gas calibration comes from the factory. Field gas changes stay simple.
• Metal C-seals and W-seals allow clean, repeatable rebuilds.
• The Unit 132 valve is common. Spare parts are easy to find.

Certification

• CE certified
• ODVA-compliant DeviceNet
• PROFIBUS DP
• SEMI E54-97
• SEMI E16-90, E17-91, E27-92, E56-96

FAQ

• Which devices and scenes suit this controller best?
  • It fits etch, CVD, and PVD tools that use fieldbus control. It also works well on gas panels where floor space is tight and leak rate matters. Networked fabs with DeviceNet or PROFIBUS backbones get the most value.
• Can I change the gas type in the field?
  • Yes. MultiFlo lets you set the gas and the full scale in the field. Use the network interface and a standard config tool. No factory trip is needed.
• Why does my flow reading shift when line pressure moves?
  • This unit has a small pressure effect: about 0.007% of reading per psi with N2. Keep the differential inside 6.65 to 350 kPa. Feed stable pressure to the inlet, and the reading stays tight.
• How do I get the fastest response from a cold start?
  • The fast-start spec is ≤1.0 sec per SEMI E17-91. Set the response time to its low end in the network config. Warm up the unit at power-on, and the first set point will settle fast.
• What causes a leak-test failure during service?
  • Most failures come from a worn C-seal or a dirty sealing face. Clean the faces with a proper solvent, then fit a new seal. Retest to 1 × 10⁻¹⁰ atm-cc/sec He before you put the unit back in line.