UFC-1662 Analog MFC by UNIT Instruments, 1660 SDS Series Controller

Product Overview

UFC-1662 is an analog mass flow controller for safe gas delivery. It belongs to the UNIT Instruments 1660 SDS Series (Safe Delivery Source). The unit controls toxic, corrosive, and pyrophoric gases inside SDS gas cabinets. It uses all-metal seals and a smooth 316L steel flow path. This helps keep gas pure and staff safe.

• Flow range: 10 sccm to 30 slm (N2 equivalent)
• Accuracy: +/-1% of setpoint; +/-0.35% FS below 35% FS
• Response: under 1 second fast start settling
• Max pressure: 500 psig operating
• Leak integrity: 1 x 10^-10 atm-cc/sec He

Core Technical Data

• Brand: UNIT Instruments
• Model: UFC-1662
• Series: 1660 SDS Series (Safe Delivery Source)
• Module type: Analog mass flow controller (MFC), SDS variant
• Full-scale flow: 10 sccm to 30 slm (N2 equivalent)
• Accuracy: +/-1% of setpoint; +/-0.35% FS below 35% FS
• Repeatability: +/-0.15% FS
• Linearity: +/-0.5% FS
• Response time: under 1 second fast start settling
• Control range: 2% to 100% of full scale
• Gas types: toxic, corrosive, pyrophoric gases in SDS gas cabinets (Cl2, HBr, HCl, BCl3, etc.)
• Operating pressure: 500 psig maximum
• Wetted materials: 316L stainless steel; 10 or 16 micro-inch Ra finish
• Seals: metal (C-seal / W-seal)
• Electrical interface: analog; card edge or D-sub connector
• Power: +/-15 VDC
• Valve: proportional electromagnetic (Unit 132 valve); normally closed or normally open solenoid
• Heated option: no (standard unheated version)
• Dimensions: approx. 137 x 127 x 38 mm (1.5 in footprint; 1/4 VCR overall length 124 mm)
• Weight: 1.2 kg (2.65 lbs)

Stability and Environment

• Operating temperature: 0 to 50 degrees C
• Zero stability: 0.6% FS per year or better without auto zero; auto-zero is standard on digital models
• Temperature coefficient: zero 0.05% FS/degree C; span 0.1% FS/degree C
• Pressure coefficient: 0.007% of reading per psi (N2)
• Leak integrity: 1 x 10^-10 atm-cc/sec He

Configuration Tree

• UFC-1662 family
  • 1662 base SDS model
    • 1662L long-body layout
  • 1663 SDS variant with its own valving and purge setup
  • 1664 SDS variant with its own valving and purge setup
• Shared traits: SDS-specific valving, purge, and safety interlock setup

Where It Fits

• SDS gas cabinets that feed toxic or corrosive lines
• Semiconductor fabs using Cl2, HBr, HCl, or BCl3
• Etch and diffusion tools that need safe gas delivery
• CVD and PVD chambers with corrosive gas supply
• Retrofit jobs that swap older analog SDS controllers

Installation Guide

• Mount inside a gas cabinet. Check tool clearance first.
• Use 1/4 VCR fittings. Keep the 124 mm overall length in mind.
• Keep pressure at or below 500 psig.
• Connect the card edge or D-sub plug to your analog control line.
• Feed +/-15 VDC power. Check polarity before power-up.
• Run a helium leak check before gas introduction.
• Follow your site safety interlock rules for pyrophoric gas.

Setup and Service Ease

• Small 1.5 in footprint saves cabinet space.
• Metal C-seal and W-seal parts swap fast.
• Analog control needs no software setup.
• Low zero drift means fewer calibration stops.
• No heater means fewer parts to service.

Compatibility Notes

• Fits SDS cabinets built around the 1660 family.
• Works with analog tool controllers that use card edge or D-sub plugs.
• Drop-in for units with the same 1/4 VCR length and connector.
• Suits gas lines rated for 500 psig or less.

Certification and Compliance

• CE certified
• SEMI E12 / E16 / E17 / E27 / E56 compliant
• NIST-traceable calibration

Packing List

• 1 x UNIT Instruments UFC-1662 analog mass flow controller
• 1 x connector set (card edge or D-sub)
• 1 x NIST-traceable calibration certificate
• 1 x user manual

FAQ

Q: Which gases does this unit target?
A: Toxic, corrosive, and pyrophoric gases used in SDS cabinets, such as Cl2, HBr, HCl, and BCl3.

Q: How high can the supply pressure go?
A: Up to 500 psig. Stay below that limit for safe sealing.

Q: What is the surface finish and why does it matter?
A: The 316L path is polished to 10 or 16 micro-inch Ra. Smooth walls limit particle traps and corrosion.

Q: How do I pick between 1662, 1662L, 1663, and 1664?
A: Match the body length, valving, purge, and interlock layout to your cabinet design. The 1662L gives a longer body.

Q: From field experience, what causes early faults?
A: Moisture in the gas line and loose fittings top the list. Purge dry and torque fittings to spec. Then run a helium leak check.

Lifecycle status: active. Official product pages verified as of 2026-11.