FC-D980 AERA Digital MFC | Multi-Gas 5 slm Piezo Controller

Product Overview

• Product Model: FC-D980
• Product Brand: AERA
• Product Series: FC-D980 Series (Digital, piezoelectric, metal-sealed)
• Core Identity: A multi-gas, multi-range digital mass flow controller.
• Valve Type: Piezoelectric valve, normally-open or normally-closed.
• Best Fit: Semiconductor process tools that need fast, stable gas control.
• Key Benefit: High accuracy, strong repeatability and long-term zero stability.
• Typical Applications:
  • CVD and PVD
  • Etch and diffusion
  • Ion implantation
  • Sputtering

Technical Data

• Brand and Model: AERA FC-D980
• Full-Scale Flow Range: 3 sccm to 5 slm (N2 equivalent, multi-gas and multi-range)
• Accuracy:
  • Within +/-1% of set point from 25% to 100% of full scale
  • Within +/-0.25% of full scale from 2% to 25% of full scale
• Repeatability: Within +/-0.2% of full scale
• Response Time: Under 1 sec to within +/-2% of set point; actual-flow settling time is 0.5 sec between set points
• Control Range / Turndown: 2% to 100% of full scale
• Zero Stability: Less than 0.5% of full-scale flow over one year
• Gas Type: Multi-gas, field programmable
  • Stores up to eight gases
  • Up to 11 calibration points per gas
• Operating Pressure:
  • Differential pressure: 7 to 40 psiD (49 to 275 kPaD)
  • Max operating pressure: 70 psig (490 kPaG)
  • Proof pressure: 140 psig (981 kPaG)
• Wetted Materials: Double VAR type 316L stainless steel; all gas-wetted surfaces electropolished and ultra-cleaned to 1 Ra (0.025 um)
• Seals: All-metal (metal seal)
• Electrical Interface: Analog 0 to 5 VDC input/output plus RS-485 (RS-232 with converter); 20-pin Honda connector
• Heated Option: No (standard unheated version)
• Operating Temperature: 5 to 45 degrees C (41 to 113 degrees F)
• Dimensions: 129 x 38 x 124 mm (H x W x D; port-to-port 124 mm; see outline drawing)
• Weight: 1.0 kg (2.2 lb)
• Power Supply:
  • +15 VDC +/-2% at 120 mA min
  • -15 VDC +/-2% at 50 mA min
  • 1.3 W max
• Leak Integrity: 1 x 10^-10 atm-cc/sec (He) max

Installation Guide

• Mount the unit in the gas line with the flow direction marked on the body.
• Keep the differential pressure between 7 and 40 psiD for stable control.
• Do not exceed 70 psig operating pressure.
• Use the 20-pin Honda connector for power and signal wiring.
• Connect RS-485 for digital control; use a converter for RS-232.
• Allow 5 to 45 degrees C ambient temperature around the device.
• Keep the inlet gas clean and dry to protect the metal seat.

Setup and Maintenance Convenience

• Field-programmable gas settings save changeover time.
• Eight stored gases and 11 calibration points per gas cut setup work.
• Built-in alarm and diagnostic functions help fast fault finding.
• All-metal seal design supports long service life.
• Electropolished, ultra-clean wetted parts reduce particle risk.
• Zero stability under 0.5% per year lowers re-calibration frequency.

Compatibility Notes

• Works with analog 0 to 5 VDC control systems.
• Supports RS-485 digital networks; RS-232 works with a converter.
• Fits multi-gas tools that need several gas recipes on one unit.
• Suits semiconductor tools such as CVD, PVD, etch and implant.
• Use N2-equivalent flow data when comparing ranges.

Certification and Compliance

• RoHS compliant.
• Settling time referenced to SEMI E17-91.
• Leak integrity tested to 1 x 10^-10 atm-cc/sec (He) max.

Packing List

• 1 x AERA FC-D980 mass flow controller
• 1 x 20-pin Honda mating connector
• 1 x Outline drawing and wiring reference
• 1 x Calibration and compliance document set

FAQ

• Q: Can one unit handle different gases?
  • A: Yes. The unit stores up to eight gases and 11 calibration points per gas.
• Q: How fast does it reach a new set point?
  • A: It settles within +/-2% in under 1 second; step-to-step settling is about 0.5 second.
• Q: Does it need a heated version?
  • A: The standard model is unheated. Choose heating only if your process gas needs it.
• Q: What pressure should I supply?
  • A: Keep differential pressure between 7 and 40 psiD, and stay under 70 psig.
• Q: How often should I re-calibrate?
  • A: Zero drift stays under 0.5% of full scale per year, so yearly checks usually suffice.
• Q: From experience, what causes unstable flow?
  • A: Most cases come from low differential pressure or dirty supply gas. Check both first.
• Q: Can I swap it into an existing RS-485 line?
  • A: Yes, it supports RS-485 directly. Use a converter only for RS-232 hosts.